动磁式直线电机定位误差检测与校正  

Detection and correction of positioning error of moving magnet linear motor

作　　者：王玉龙 任德均[1] 王淋楠 盘龙 WANG Yulong;REN Dejun;WANG Linnan;PAN Long(School of Mechanical Engineering,Sichuan University,Chengdu 610065,China;School of Automation Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]四川大学机械工程学院,四川成都610065 [2]电子科技大学自动化工程学院,四川成都611731

出　　处：《传感器与微系统》2024年第9期123-126,共4页Transducer and Microsystem Technologies

摘　　要：提出一种针对动磁式直线电机定位方案的误差检测及校正的方法。首先,通过相位检测算法检测传感器阵列的相位偏差是否符合要求;然后,通过幅值相位纠正算法实现对磁场数据归一化,并对小幅度相位偏差引起的位置误差进行校正;最后,对数据采集和处理过程中的延时误差进行补偿。对动子运动方向的磁栅尺寸误差补偿后,定位精度达到了±92μm。This paper proposes an error detection and correction method for this type of moving magnet linear motor positioning scheme.Firstly,a phase detection algorithm is used to detect whether the phase deviation of the sensor array meets the requirements.Then,a magnitude-phase correction algorithm is used to normalize the magnetic field data and correct the positional error caused by small phase deviations.Finally,the delay error in data acquisition and processing process is compensated.After compensating for the magnetic grid size error in the mover’s movement direction,the positioning precision reaches±92μm.

关 键 词：动磁式 直线电机 位置传感器 误差检测校正 

分 类 号：TN911.7[电子电信—通信与信息系统] TP212.1[电子电信—信息与通信工程]