拉曼光谱仪及其微型化  

Raman spectrometer and its miniaturization

作　　者：薛兴梅 张莉丽 罗枭 周琳 张先彪 陈昌 XUE Xingmei;ZHANG Lili;LUO Xiao;ZHOU Lin;ZHANG Xianbiao;CHEN Chang(School of Microelectronics,Shanghai University,Shanghai,201800;Shanghai Photonic View Technology Co.,Ltd,Shanghai,200444;Institute of Medical Chips,Ruijin Hospital,Shanghai Jiao Tong University School of Medicine,Shanghai,200025;Shanghai IndustrialμmTechnology Research Institute,Shanghai,201800;State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai,200050)

机构地区：[1]上海大学微电子学院,上海201800 [2]上海近观科技有限责任公司,上海200444 [3]上海交通大学医学院附属瑞金医院医学芯片研究所,上海200025 [4]上海微技术工业研究院,上海201800 [5]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《光散射学报》2024年第3期290-304,共15页The Journal of Light Scattering

基　　金：上海交通大学医学院附属瑞金医院广慈高能计划和基于时间门控技术的无创血糖检测项目(KY2023810)的资助。

摘　　要：近年来,拉曼光谱以其快速无损、分子特异性高、灵敏度高等特点在材料科学、生物医学和环境监测等领域得到了广泛应用,成为光谱分析的重要工具。然而,传统拉曼光谱仪由于尺寸庞大、成本昂贵而难以适应许多特殊应用场景,因此,人们对于微型化、低成本、高性能拉曼光谱仪的需求日益增加。硅基光电子技术的进步为拉曼光谱仪的微型化带来了新的发展机遇,使得芯片级的拉曼光谱仪成为了可能。本文对拉曼光谱仪及其微型化的发展历程进行了综述,同时,讨论了部分具有拉曼应用潜力的片上光谱仪,为已有拉曼光谱仪的微型化及微型化光谱仪的拉曼应用探究提供重要的参考,并推动技术与应用的共同发展和不断创新。In recent years,Raman spectroscopy has been widely used in materials science,biomedical science,and environmental monitoring due to its fast non-destructive,high molecular specificity,and high sensitivity characteristics,becoming an important tool for spectral analysis.However,traditional Raman spectrometers are difficult to adapt to many special application scenarios due to their large size and high cost.Therefore,the demand for miniaturized,low-cost,and high-performance Raman spectrometers is increasing.The advancement of integrated optoelectronic technology has brought new development opportunities for the miniaturization of Raman spectrometers,making chip level Raman spectrometers possible.This article reviews the advancement of Raman spectrometers and their miniaturization.Meanwhile,it introducesexemplary on-chip spectrometers with potentials for Raman spectroscopy applications,providing important references for the miniaturization of existing Raman spectrometers and the exploration of spectral applications in miniaturized spectrometers,and promoting the common development and continuous innovation of technology and applications.

关 键 词：拉曼光谱仪 光谱检测 微型化 硅基光电子 片上集成 

分 类 号：O433[机械工程—光学工程]