压力传感器温度响应特性校准装置研究  

Research on Pressure Sensors Temperature-response Characteristics Calibration Device

作　　者：高炳涛 孙海涛[1] 霍瑞东 郭一梦 王小三[1] 黄其刚[1] GAO Bingtao;SUN Haitao;HUO Ruidong;GUO Yimeng;WANG Xiaosan;HUANG Qigang(Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076,China)

机构地区：[1]北京航天计量测试技术研究所,北京100076

出　　处：《宇航计测技术》2024年第4期17-22,共6页Journal of Astronautic Metrology and Measurement

摘　　要：为确保测量数据的准确性,需对压力传感器在高低温环境下温度响应特性参数进行校准,通过开展标准压力源、温度隔离单元、多点测温校准腔等系统设计,研制了一套压力传感器温度响应特性校准装置,实现了在-50℃至100℃环境温度条件下,对绝压2~500 kPa范围内压力传感器校准,校准装置测量不确定度优于0.05%(k=2),为开展压力传感器温度响应特性研究奠定了基础。In order to ensure the accuracy of the measurement data,it is necessary to calibrate the temperature-response characteristics parameters of the pressure sensor under high and low temperature environment.The temperature-response characteristics calibration device for the pressure sensors is developed by designing systems such as the standard pressure sources,the temperature isolation units,and the multi-point temperature measurement calibration chambers.The calibration of the pressure sensors,within the pressure range of absolute pressure 2~500 kPa and under the ambient temperature conditions of-50℃~100℃,is realized.The measurement uncertainty of the calibration device is better than 0.05%(k=2),laying the foundation for conducting research on the temperature response characteristics of pressure sensors.

关 键 词：校准 压力传感器 校准装置 

分 类 号：TH823[机械工程—仪器科学与技术] V11[机械工程—精密仪器及机械]