Innovative coaxial high-temperature thin-film sensor with core-shell structure surpassing traditional multilayer films  

作　　者：Chao Wu Guo-Chun Chen Fu-Xin Zhao Fan Lin Ying-Jun Zeng Yan-Zhang Fu Yan-Song Zhang Li-Da Xu Qin-Nan Chen Rui Tang Dao-Heng Sun Zhen-Yin Hai 

机构地区：[1]Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361005,China [2]AECC Shenyang Engine Institute,Shenyang 110015,China [3]School of Aerospace Engineering,Xiamen University,Xiamen 361005,China

出　　处：《Rare Metals》2024年第8期3854-3867,共14页稀有金属（英文版）

基　　金：financially supported by Shenyang Engine Design and Research Institute (No.JC 3 602007026)。

摘　　要：High-temperature thin-film sensors(TFSs)often suffer from inadequate tolerance to elevated temperatures.In this study,an innovative approach is presented to fabricate in situ integrated TFSs with a core-shell structure on alloy components using coaxial multi-ink printing technique.This method replaces traditional layerby-layer(LbL) deposition and LbL sintering processes and achieves simplified one-step manufacturing.The coaxial TFS includes a conductive Pt core for conducting and sensing and a dielectric shell for electrical isolation and high-temperature protection.The coaxial Pt resistance grid demonstrates excellent high-temperature stability,with a resistance drift rate of only 0.08%·h^(-1) at 800 ℃,significantly lower than traditional Pt TFSs.By employing this method,a Pt thin-film strain gauge(TFSG) is fabricated that boasts remarkable high-temperature electromechanical properties.This effectively addresses the problem of sensitivity degradation experienced by traditional LbL Pt TFSGs when subjected to high temperatures.We demonstrate the system integration potential of the technique by printing and verifying the functionality of a long-path thinfilm resistance grid on turbine blades,which can withstand butane flame up to ~1300℃.These results showcase the potential of core-shell structure of the coaxial TFS for high-temperature applications,providing a novel approach to develop high-performance TFS beyond traditional multilayer structure.

关 键 词：Coaxial printing Core-shell structure Thinfilm strain gauge High-temperature stability 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB383.2[自动化与计算机技术—控制科学与工程]