链式热氧化与槽式碱抛光工艺条件对PERC单晶硅太阳电池光电转换效率的影响  

INFLUENCE OF PROCESS CONDITIONS OF CHAIN THERMAL OXIDATION AND TROUGH TYPE ALKALINE POLISHING ON PHOTOELECTRIC CONVERSION EFFICIENCY OF PERC MONO-Si SOLAR CELLS

作　　者：晏海刚 李宁 张绳亮 王磊 张仕君 王慧芳 Yan Haigang;Li Ning;Zhang Shengliang;Wang Lei;Zhang Shijun;Wang Huifang(Yiwu JingAo Solar Co.,Ltd,Jinhua 322000,China)

机构地区：[1]义乌晶澳太阳能科技有限公司,金华322000

出　　处：《太阳能》2024年第8期95-103,共9页Solar Energy

摘　　要：针对PERC单晶硅太阳电池制备工艺中3合1工序的链式热氧化工艺的氧化性能与槽式碱抛光工艺酸洗槽的去氧化能力的工艺窗口及匹配性进行了研究。首先设计实验分别测试链式热氧化工艺条件(包括温度、氧气流量)、槽式碱抛光工艺的酸洗槽液体浓度对扩散后硅片表面掺杂浓度及PERC单晶硅太阳电池光电转换效率的影响;再根据初步实验结果对链式热氧化工艺与槽式碱抛光工艺的匹配性进行分析,得到整体3合1工序的优化工艺方案;然后采用电化学微分电容电压(ECV)测试扩散后硅片表面掺杂浓度及结深的变化情况,对研究结果进行了佐证,最终达到提升PERC单晶硅太阳电池光电转换效率的目的。研究结果表明:3合1工序中的链式热氧化工艺与槽式碱抛光工艺对扩散后硅片表面掺杂浓度及PERC单晶硅太阳电池电性能存在重要影响,优化链式热氧化工艺的温度、氧气流量与槽式碱抛光工艺的酸洗槽液体浓度,提高二者的匹配性,使氧化能力与去氧化能力均达到临界点,可以最大程度地提高PERC单晶硅太阳电池的光电转换效率。A study is conducted on the process window and matching of the oxidation performance of the chain thermal oxidation process and the oxidation removal ability of the acid pickling tank in the trough type alkaline polishing process in the 3-in-1 process of PERC mono-Si solar cell preparation.This paper first designs experiments to test the effects of chain thermal oxidation process conditions(including temperature,oxygen flow rate),liquid concentration in acid pickling tank of trough type alkaline polishing process on the surface doping concentration of diffused silicon wafers and the photoelectric conversion efficiency of PERC mono-Si solar cells.Further analyze the compatibility between the chain thermal oxidation process and the trough type alkaline polishing process based on preliminary experimental results,and obtain an optimized process plan for the overall 3-in-1 process.Then,ECV is used to test the changes in surface doping concentration and junction depth of the diffused silicon wafers,which supported the research results and ultimately achieved the goal of improving the photoelectric conversion efficiency of PERC mono-Si solar cells.The research results show that the chain thermal oxidation process and trough type alkaline polishing process in the 3-in-1 process have a significant impact on the surface doping concentration of diffused silicon wafers and the electrical performance of PERC mono-Si solar cells.Optimizing the temperature and oxygen flow rate of the chain thermal oxidation process,and the liquid concentration in acid pickling tank of the trough type alkaline polishing process to improve their compatibility,so that both the oxidation ability and the oxidation removal ability reach the critical point,which can maximize the photoelectric conversion efficiency of PERC mono-Si solar cells.

关 键 词：PERC单晶硅太阳电池 链式热氧化 槽式碱抛光 酸洗槽液体浓度 掺杂浓度 光电转换效率 电性能 

分 类 号：TM615[电气工程—电力系统及自动化]