面向MEMS质谱仪离子源的场发射针尖阵列研制及性能  

Development and Performance of Field Emission Tip Array for MEMS Mass Spectrometer Ion Source

作　　者：吴章旭 程玉鹏[1,2] 李山 朱五林 沈琛 胡郑蕊 徐椿景 陈池来 Wu Zhangxu;Cheng Yupeng;Li Shan;Zhu Wulin;Shen Chen;Hu Zhengrui;Xu Chunjing;Chen Chilai(University of Science and Technology of China,Hefei 230026,China;Institute of Intelligent Machines,Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China;Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]中国科学技术大学,合肥230026 [2]中国科学院合肥物质科学研究院智能机械研究所,合肥230031 [3]中国科学技术大学精密机械与精密仪器系,合肥230026

出　　处：《微纳电子技术》2024年第9期100-107,共8页Micronanoelectronic Technology

基　　金：国家重点研发计划(2021YFC2800301);中国科学院战略先导专项(XDA22020503);中国科学院科研装备研制项目(YJKYYQ20210008);中国科学院合肥物质科学研究院院长基金(YZJJ202203-CX)。

摘　　要：针对微电子机械系统(MEMS)质谱仪应用中对高工作气压和高电子电流的需求,同时保持MEMS技术在体积和质量上的优势,研制了一种用于MEMS质谱仪离子源的基于场发射原理的针尖阵列。通过MEMS加工技术实现了最大44个/mm^(2)的针尖密度,并在4和6英寸(1英寸=2.54 cm)的硅基晶圆上完成平行批量制造。实验结果显示,1600个针尖组成的阵列在3.4×10^(-3)Pa气压下最大发射电流达到1.28 mA,在23.71 Pa的气压下达到92.93μA,同时单片集成结构使其具备与永磁体结合的放电增强能力,磁场下针尖阵列的最大放电电流提升175.79%。初步的测试结果证实了场发射针尖阵列作为离子源在MEMS质谱仪中的应用潜力。In response to the needs for high working air pressure and high electron current in the application of micro-electromechanical system(MEMS)mass spectrometers,meanwhile keeping the advantage in size and weight of MEMS technology,a tip array based on field emission was developed for MEMS mass spectrometer ion source.A maximum tip density of 44 tips/mm^(2)was achieved through MEMS machining technology,and parallel batch manufacturing was performed on 4-and 6-inch(1 inch=2.54 cm)silicon wafers.The experimental results show that the maximum emission current of the array composed of 1600 tips reaches 1.28 mA under the air pressure of 3.4×10^(-3)Pa and 92.93μA under 23.71 Pa,respectively.Meanwhile,the monolithic integrated structure enables the array to combine with permanent magnets to enhance discharge.Under the magnetic field,the maximum discharge current of the tip array increases by 175.79%.The preliminary test results confirm the application potential of field emission tip array as ion sources in MEMS mass spectrometers.

关 键 词：质谱仪 微电子机械系统(MEMS) 针尖阵列 离子源 场发射 电子发射 

分 类 号：TH843[机械工程—仪器科学与技术] TH703[机械工程—精密仪器及机械]