材料表面润湿性对超微量胶液分配及封装效果的影响  

Influences of Material Surface Wettability on Distribution and Encapsulation Effect of Ultra-Micro Adhesive

作　　者：张嘉容 刘慧芳[1] 陈曦 冯天成 王文国 Zhang Jiarong;Liu Huifang;Chen Xi;Feng Tiancheng;Wang Wenguo(School of Mechanical Engineering,Shenyang University of Technology,Shenyang 110870,China;Beijing Institute of Automotive Research Co.,Ltd.,Beijing 101300,China)

机构地区：[1]沈阳工业大学机械工程学院,沈阳110870 [2]北京汽车研究总院有限公司,北京101300

出　　处：《微纳电子技术》2024年第9期148-155,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金面上项目(52175428);辽宁省教育厅重点攻关项目(LJKZZ20220020);辽宁省研究生教育教学改革研究项目(LNYJG2022067)。

摘　　要：为了在微纳元件的封装中实现pL级超微量胶液的分配,根据不同材料表面具有不同表面润湿性的性质,提出了一种微纳量级的点胶方法。首先,使用自主搭建的超微量点胶系统进行pL级胶液分配实验,该系统点样的平均体积误差≤±1.1%,转移液滴的最小体积约为19.6 pL;然后,通过改变表面润湿性的单因素实验分析接触角对胶液转移量的影响,实验结果表明,接触角可以直观反映材料表面的润湿程度,即接触角越小,表面润湿性越好,转移液滴体积越大;最后,根据接触角与转移液滴体积的实验数据进行非线性曲线拟合,推导出了转移液滴体积预测公式,利用该公式预测的转移液滴体积与实测体积之间的平均差异率为2.32%。In order to achieve the distribution of pL-level ultra-micro adhesive in the micro/nano component encapsulation,A micro/nano level dispensing method was proposed based on the properties of different materials with different surface wettability.Firstly,a self-developed ultramicro dispensing system was used for pL-level dispensing experiments,the average volume error of samples dispensing by the system≤±1.1%,and the minimum volume of transferred droplets was about 19.6 pL.Then,the influence of contact angle on the transfer volume of adhensive was analyzed by the single factor experiment of changing the surface wettability.And the experimental results show that the contact angle can directly reflect the wetting degree of material surfaces,that is,the smaller the contact angle,the better the surface wettability,and the larger the volume of transfer droplet.Finally,based on the experimental data of the contact angle and the transfer droplet volume,a non-linear curve fitting was performed,and the prediction formula for the transfer droplet volume was derived.The average difference rate between the predicted transfer droplet volume by the formula and the measured volume is 2.32%.

关 键 词：微纳元件 pL级 表面润湿性 超微量点胶 接触角 曲线拟合 体积预测 

分 类 号：TH706[机械工程—仪器科学与技术]