双通道放气率测量装置器壁放气动态特性分析与碳化硼放气率测试  

Analysis of Wall Outgassing Characteristics of Dual-Channel Outgassing Rate Measurement Device and Boron Carbide Outgassing Rate Test

作　　者：蔡洋洋 王国栋[1] 刘霄 王姣龙 陈长琦[1] 胡庆生 CAI Yangyang;WANG Guodong;LIU Xiao;WANG Jiaolong;CHEN Changqi;HU Qingsheng(College of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;Institute of Plasma Physics,Hefei Institute of Materials Research,CAS,Hefei 230031,China)

机构地区：[1]合肥工业大学机械工程学院,合肥230009 [2]中国科学院合肥物质研究院等离子体物理研究所,合肥230031

出　　处：《真空科学与技术学报》2024年第8期673-678,共6页Chinese Journal of Vacuum Science and Technology

基　　金：ITER计划第12号诊断窗口集成。

摘　　要：双通道法是一种高精度、低检测下限的材料放气率测量方法,适用于碳化硼等低放气率材料。该方法需要先测定测量系统的本底放气量,即在系统压力稳定后,选取某一时刻的压力值计算后作为本底放气量。针对装置本底放气量测量,文章基于吸附扩散理论,建立了双通道测量系统的吸附−扩散−解离模型,并进行了数值计算分析,研究了系统本底压力随温度的变化规律,计算结果与实验结果吻合良好。同时,文章对含B4C样品的系统进行了放气量测试,并减去装置本底放气量,得到碳化硼在室温与150℃下的放气率数值,计算得到碳化硼放气率测量的不确定度为11.78%。这为后续的测试研究提供了理论支持。The two-channel method is a high-precision,low-lower-limit-of-detection method for measuring the outgassing rate of materials and is suitable for low-outgassing rate materials such as boron carbide.The method needs to determine the background outgassing volume of the measurement system,i.e.,after the system pressure is stabilized,the pressure value at a certain moment is selected and calculated as the background outgassing volume.For the device background outgassing measurement,this paper is based on the adsorption diffusion theory,the establishment of a dual-channel measurement system adsorption-diffusion-dissociation model,and numerical calculation and analysis,the study of the system background pressure with the change rule of the temperature,the calculation results are in good agreement with the experimental results.At the same time,this paper carried out the outgassing test on the system containing B4C samples and subtracted the background outgassing of the device to obtain boron carbide values of outgassing rates at room temperature and 150℃.The uncertainty of the outgassing rate measurement of boron carbide was calculated to be 11.78%,which provided theoretical support for the subsequent test research.

关 键 词：放气率测量 双通道法 吸附−扩散−解离模型 碳化硼 

分 类 号：TB77[一般工业技术—真空技术]