2 m平面镜检测光路偏心调整误差影响分析  

Analysis of the Influence of 2 m Plane Mirror on the Adjustment Error of Optical Path Eccentricity

作　　者：王鑫蕊 杨永兴 李金鹏 赖新华 曾昶宇 何鹏 Wang Xinrui;Yang Yongxing;Li Jinpeng;Lai Xinhua;Zeng Changyu;He Peng(University of Science and Technology of China,Hefei 230022,Anhui,China;Nanjing Research Center of Astronomical Instruments,University of Science and Technology of China,Nanjing 210042,Jiangsu,China;Nanjing Astronomical Instruments Co.,Ltd.,Chinese Academy of Sciences,Nanjing 210042,Jiangsu,China;Mathematics and Science College,Shanghai Normal University,Shanghai 200234,China)

机构地区：[1]中国科学技术大学,安徽合肥230022 [2]中国科学技术大学南京天文仪器研制中心,江苏南京210042 [3]中科院南京天文仪器有限公司,江苏南京210042 [4]上海师范大学数理学院,上海200234

出　　处：《应用激光》2024年第6期168-176,共9页Applied Laser

基　　金：外国专家项目(BX2021067);国家自然科学基金项目(12003067);高端外国专家引进计划(G2021015001L);江苏外专百人计划(BX2021067)。

摘　　要：大口径平面镜面形高精度检测是一个精密装调的过程,面形恢复精度易受检测过程中人为主观因素的干扰。为解决大口径平面镜高精度面形检测问题,对光路检测偏心误差以及由偏心误差引起的瑞奇角计算精度改变、干涉仪中心到平面镜距离等联动误差进行分析。通过使用光学软件搭建2 m平面镜检测模型,设定不同的偏心误差获得系统波像差,解算系统波像差数据获得待测平面镜面形数据,与预设标准面形进行对比。分析发现面形恢复结果对偏心误差较为敏感,需保证两个瑞奇角差值在12°~25°范围内,并且在检测时将偏心误差控制在口径的5%范围内,面形恢复结果对偏心误差及其引起的联动误差变化不敏感,待测面形RMS精度在10^(-3)λ内。基于以上误差仿真分析,对实际φ2 m平面镜面形检测进行指导,结果显示平面镜的RMS达到0.020 9λ,PV为0.128 4λ(其中RMS是Root Mean Square的缩写,代表平面镜面型数据的均方根;PV是Peak-to-Valley的缩写,代表平面镜面型数据的最大变化;λ=632.8 nm)。研究旨在揭示偏心误差及其联动误差对2 m平面镜面形的影响程度,对大口镜平面镜的实际光路搭建并降低人为调整误差具有指导作用。Because the high-precision detection of large-aperture plane mirror surface shape is a process of precise adjustment, the surface shape recovery accuracy is easily disturbed by human subjective factors in the detection process. In order to solve the problem of high-precision surface shape detection of large-aperture plane mirrors, the eccentricity error of optical path detection and the resulting change in the calculation accuracy of the ritchey angle, the distance from the center of the interferometer to the plane mirror and other linkage errors are analyzed. By using optical software to build a 2 m plane mirror detection model, set different eccentricity errors to obtain the system wave aberration, solve the system wave aberration data to obtain the plane mirror shape data to be measured, and compare it with the preset standard surface shape. The analysis shows that the surface shape recovery result is more sensitive to the eccentricity error. It is necessary to ensure that the difference between the two ritchey angles is within the range of 12°~25°, and the eccentricity error is controlled within 5% of the diameter during detection. It is not sensitive to the eccentricity error and the change of linkage error caused by it, and the RMS accuracy of the surface to be measured is within 10^(-3)λ. Based on the above error simulation analysis, the actual φ2 m plane mirror surface shape detection is guided, and the results show that the RMS of the plane mirror reaches 0.020 9λ, and the PV is 0.128 4λ(λ=632.8 nm).The purpose of this paper is to reveal the degree of influence of eccentricity error and linkage error on the shape of a 2 m plane mirror, which has a guiding role in the construction of the actual optical path of the large-aperture mirror plane mirror and the reduction of artificial adjustment errors.

关 键 词：2 m平面镜 瑞奇-康芒 偏心误差 瑞奇角优选 联动误差分析 

分 类 号：O439[机械工程—光学工程]