基于二氧化硅波导环的干涉式集成光学陀螺  

Interferometric Integrated Optical Gyro Based on Silica Waveguide Ring

作　　者：黎宇轩[1] 吴泓[1] Li Yuxuan;Wu Hong(School of Computer Information Engineering,Nanchang Institute of Technology,Nanchang 330044,Jiangri,China)

机构地区：[1]南昌理工学院计算机信息工程学院,江西南昌330044

出　　处：《应用激光》2024年第6期200-206,共7页Applied Laser

基　　金：江西省教育厅科学技术研究项目(GJJ212117)。

摘　　要：为实现干涉式集成光学陀螺的小型化和集成化目标,提出并设计基于二氧化硅波导干涉环的集成光学陀螺系统。首先,确定二氧化硅波导的结构及截面尺寸,其截面尺寸为4.5μm×4.5μm;其次,进一步确定了二氧化硅波导环的弯曲半径为10 mm以及波导环之间的间距为50μm。最终制作完成了长为2.434 m的二氧化硅波导干涉环。最后,利用该二氧化硅波导环搭建了干涉式集成光学陀螺测试系统,得到陀螺长期零偏稳定性(Allan方差)为110.5 (°)/h。该波导环的成功制作与测试有利于降低干涉式陀螺的体积,促进干涉式集成光学陀螺的工程化应用。In this paper, an interferometric integrated optical gyro system based on silica waveguide interference ring is proposed and designed to realize the miniaturization and integration of interferometric integrated optical gyro. Firstly, the structure and cross section size of silica waveguide were determined, and the cross-section size was 4.5 μm×4.5 μm. Secondly, the bending radius of silica waveguide rings is determined to be 10 mm and the spacing between waveguide rings is determined to be 50 μm. Finally, the length of 2.434 m silica waveguide interference ring is fabricated. Meanwhile, an interferometric integrated optical gyroscope tst system was built using the silica waveguide ring, and the Allan variance of gyroscope was 110.5(°)/h. The successful fabrication and testing of the waveguide ring is beneficial to reduce the volume of interferometric gyroscope and promote the engineering application of interferometric integrated optical gyro.

关 键 词：二氧化硅波导环 集成光学陀螺 极限灵敏度 零偏稳定性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]