数字孪生在半导体测试设备中的实践  

The practice of digital twinship in semiconductor testing equipment

作　　者：祁建华 马诗旻 何桂玲 Qi Jianhua;Ma Shimin;He Guiling(Sino IC Technology Co.,Ltd.,Shanghai 201203,China;Huozhi Technology Co.,Ltd.,Shanghai 201402,China)

机构地区：[1]上海华岭集成电路技术股份有限公司,上海201203 [2]上海火挚科技有限公司,上海201402

出　　处：《电子技术应用》2024年第9期25-30,共6页Application of Electronic Technique

基　　金：2021年度浦东新区科技发展基金社会领域数字化转型专项(PKS2021-02)。

摘　　要：数字孪生作为智能制造关键技术在工厂极具实用价值。通过在半导体测试服务公司建立数字孪生系统,收集了探针台二十多万条报警数据。结果显示,超过90%的报警已通过数字孪生系统实现了远程控制解决。为探索报警处理的最佳方式,进一步优化数字孪生模型,并在模型中重现报警,通过模拟不同工况,与传统方式相比,人工操作数字孪生系统处理报警可使设备等待时间减少64%以上。若采用AI后台自行操作数字孪生系统,设备等待时间可继续降低78%。这表明人工对设备报警的反应时间是影响设备等待时间的关键因素,因此,深化使用数字孪生模型自动化处理报警可显著降低设备等待时间,提升设备综合利用率。Digital twin is an essential technology in smart manufacturing and has practical value in factories.At a semiconductor testing services company,a digital twin system was used to collect over 200000 alarm data points from probe stations.The analysis showed that more than 90%of the alarms were resolved remotely using the digital twin system.To improve the digital twin model and alarm management,alarms were replicated within the model by simulating different scenarios.Operating the digital twin system manually reduced equipment downtime by over 64%compared to traditional methods.Additionally,using an AI backend to automatically operate the digital twin system further reduced equipment waiting time by 78%.This highlights the importance of personnel response time to equipment alarms in affecting equipment downtime.Therefore,enhancing the use of digital twin models for automated alarm handling can significantly reduce equipment downtime and improve overall equipment utilization.

关 键 词：数字孪生 半导体测试设备 远程控制 报警处理 自动化 

分 类 号：TN711.5[电子电信—电路与系统]