激光烧蚀反应烧结碳化硅表面形貌特征及亚表面损伤研究  

Study on Surface Characteristics and Subsurface Damage of RB-SiC/Si by Laser Ablation

作　　者：张全利 刘建[1] 孙智源 吴明涛 蔡毅斌 曾加恒 金锃阳 傅玉灿[1] Zhang Quanli;Liu Jian;Sun Zhiyuan;Wu Mingtao;Cai Yibin;Zeng Jiaheng;Jin Zengyang;Fu Yucan(Naijing University of Aeronautics and Astronautics,Naning 210016,China;Shenyang Aircraft Corporation,Shenyang 110850,China;Sichuan Precision and Ultra-precision Machining Engineering Technology Research Center,Sichuan Chengdu 610200,China)

机构地区：[1]南京航空航天大学,江苏南京210016 [2]航空工业沈阳飞机工业(集团)有限公司,辽宁沈阳110850 [3]四川省精密超精密加工工程技术研究中心,四川成都610200

出　　处：《航空科学技术》2024年第7期56-64,共9页Aeronautical Science & Technology

基　　金：国家自然科学基金(52175412,52005461);航空科学基金(2019ZE052014)。

摘　　要：反应烧结碳化硅(RB-SiC/Si)因具有耐高温、耐腐蚀、比刚度高、热膨胀小、耐磨等优点而广泛应用于大口径空间望远镜、卫星遥感、航空发动机零部件等领域。然而高强度高硬度的材料特性,也导致反应烧结碳化硅呈现出难加工的特点。激光束加工具有能量密度高、加工范围广等特点,适用于加工硬脆材料,但同时也存在表面热损伤严重的缺点。本文研究了激光参数对反应烧结碳化硅加工表面形貌特征的影响,分析了纳秒激光与反应烧结碳化硅之间的作用机理。在反应烧结碳化硅烧蚀产物分析基础上确定了高温氧化过程及氧化产物类型。通过角度抛光法研究激光加工单沟槽产生的亚表面损伤,以及激光加工沟槽组之间产生的大尺寸亚表层损伤,建立了激光加工参数与亚表面损伤深度间映射关系。本文的研究成果可为反应烧结碳化硅的高效精密低损伤加工奠定理论基础和提供技术支持。RB-SiC/Si has the advantages of high specific stiffness,good chemical stability,low thermal expansion coefficient and wear resistance,etc.Therefore,it is widely applied in large aperture space telescopes,satellite remote sensing,aviation engine components,and so on.However,the material characteristics of high strength and hardness also make it difficult to be machined.Characterized of high energy density,Laser processing is suitable for hard and brittle materials but it always leads to surface thermal damage.In this paper,the influence of laser parameters on the surface characteristics of RB-SiC/Si was investigated,and the interaction between the nanosecond laser pulse and RB-SiC/Si was analyzed.The high-temperature oxidation process and the oxidation product were identified.The subsurface damage of the laser ablated single groove and groove groups were investigated and compared by angle polishing to achieve the dependence on the laser processing parameters.The achieved results can provide certain theoretical and technical support for precision machining of RB-SiC/Si with low surface and subsurface damage.

关 键 词：纳秒脉冲激光 RB-SiC/Si 材料去除机理 表面特征 亚表面损伤 

分 类 号：V261.8[航空宇航科学与技术—航空宇航制造工程]