Au修饰SnO_(2)薄膜兼容型高响应乙炔气体传感器研制  

Development of Gas Sensor with High Response to Acetylene Based on the Au Decorated SnO_(2)Thin Film

作　　者：胡宗鑫 田兵 谭则杰 徐振恒 王海容[1,2] HU Zongxin;TIAN Bing;TAN Zejie;XU Zhenheng;WANG Hairong(State Key Laboratory for Manufacturing Systems Engineering,Xi’an Jiaotong University,Xi’an 710049,China;School of Mechanical Engineering,Xi’an Jiaotong University,Xi’an 710049,China;Digital Grid Research Institute,China Southern Power Grid Co.,Ltd.,Guangzhou 510700,China)

机构地区：[1]西安交通大学精密微纳制造技术全国重点实验室,西安710049 [2]西安交通大学机械工程学院,西安710049 [3]南方电网数字电网研究院有限公司,广州510700

出　　处：《西安交通大学学报》2024年第9期129-138,共10页Journal of Xi'an Jiaotong University

基　　金：国家重点研发计划资助项目(2022YFB3206800);南方电网数字电网研究院股份有限公司科技项目(210000KC23010005)。

摘　　要：为了实现变压器油中溶解的乙炔气体检测,研发了一款基于Au修饰SnO_(2)气敏薄膜的乙炔气体传感器。通过射频溅射制备SnO_(2)薄膜,进而通过直流溅射制备Au并改变溅射时间,得到不同Au修饰量的气敏薄膜,采用微机电系统(MEMS)工艺开发了基于气敏薄膜的乙炔气体传感芯片。对比纯SnO_(2)以及不同Au修饰量的SnO_(2)气敏薄膜的气敏性能,结果显示,基于20 s-Au修饰的SnO_(2)薄膜MEMS乙炔传感器性能最佳,最佳工作温度为200℃,体积分数为1×10^(-6)的乙炔气体的响应值高达14,响应恢复时间分别为5 s和87 s,且具有良好的重复性,检测限低至0.1×10^(-6)(体积分数)。对比测试体积分数为1×10^(-6)下变压器油中溶解的氢气、甲烷等其他气体,所研发的MEMS乙炔气体传感器仍具有优越的选择性,在长期测试下保持良好稳定性,可为解决变压器油中溶解乙炔气体的检测难题提供一种元件选择。To detect acetylene gas dissolved in transformer oil,an acetylene gas sensor based on Au decorated SnO_(2)gas sensing thin film is developed.SnO_(2)thin films were prepared using radio frequency magnetron sputtering followed by the deposition of Au using direct current magnetron sputtering.The different amounts of Au decoration were realized by adjusting the deposition time.Then the acetylene gas sensing chips,based on gas sensing thin films,are fabricated using the process of micro electro mechanical systems(MEMS).The sensing properties of the pure SnO_(2)and Au decorated SnO_(2)films are compared.The results indicates that the sensor using the 20 s-Au decorated SnO_(2)film shows superior performance,operating optimally at 200°C.It exhibits a response value of 14 to acetylene gas at a volume fraction of 1×10^(-6),with response and recovery times of 5 s and 87 s,respectively.The sensor exhibits excellent repeatability,with a detection limit of 0.1×10^(-6)in volume fraction.In comparison testing against hydrogen,methane,and other gases dissolved in the transformer oil at a concentration of 1×10^(-6)volume fraction,the sensor has a good selective response to acetylene and maintains excellent performance stability over long-term testing.It can serve as a component selection for addressing the challenge of detecting dissolved acetylene gas in transformer oil.

关 键 词：变压器油 乙炔 Au修饰 氧化锡 气体传感器 

分 类 号：TM835[电气工程—高电压与绝缘技术] TP212[自动化与计算机技术—检测技术与自动化装置]