Holographic laser fabrication of 3D artificial compound μ-eyes  

作　　者：Lei Wang Wei Gong Xiao-Wen Cao Yan-Hao Yu Saulius Juodkazis Qi-Dai Chen 

机构地区：[1]Jilin University,State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Changchun,130012,China [2]Optical Sciences Centre and ARC Training Centre in Surface Engineering for Advanced Materials(SEAM),School of Science,Swinburne University of Technology,Hawthorn,Victoria 3122,Australia [3]Melbourne Centre for Nanofabrication,151 Wellington Road,Clayton VIC,3168,Australia

出　　处：《Light(Advanced Manufacturing)》2023年第4期1-9,共9页光（先进制造）（英文）

基　　金：National Key R&D Program of China(2021YFB2802000);National Natural Science Foundation of China(61827826,62175086,62131018);Natural Science Foundation of Jilin Province(20220101107JC);Education Department of Jilin Province(JJKH20221003KJ);Interdisciplinary Integration and Innovation Project of JLU(JLUXKJC2021ZZ15);All authors thank Prof.

摘　　要：The demand for fast optical image acquisition without movable optical elements(e.g.,for self-driving car technology)can be met using bioinspired 3D compound eyes.3D laser processing strategies enable designable 3D structuring but suffer from low fabrication efficiency,which significantly limits their applications in producing complex 3D optical devices.Herein,we demonstrate a versatile yet simple wet-etching-assisted holographic laser fabrication method for the development of 3D compound eyes.Artificial compoundμ-eyes can be readily fabricated by programming a 3D spot array for the parallel ablation of a curved fused silica surface,followed by controllable etching in a hydrofluoric(HF)acid solution.A 3D-concave-lens array made on a curved surface over an area of 100μm cross-section with each lenslet of 10μm radius was fabricated with high fidelity and excellent imaging/focusing quality.The resultant 3D-concave-lens can serve as a hard template for the mass production of soft compound eyes through soft lithography.Additionally,using a generative adversarial network(GAN)-based deep learning algorithm,image restoration was conducted for each lenslet,which retained a large field of view and significantly improved image quality.This method provides a simple solution to the requirements of compoundμ-eyes required by Industry 4.0.

关 键 词：Holographic laser fabrication Wet etching compound eye MICRO-OPTICS Fast imaging Imaging restoration 

分 类 号：TN24[电子电信—物理电子学]