Hybrid-integrated chalcogenide photonics  

作　　者：Bin Zhang Di Xia Xin Zhao Lei Wan Zhaohui Li 

机构地区：[1]Guangdong Provincial Key Laboratory of Optoelectronic Information Processing Chips and Systems,School of Electrical and Information Technology,Sun Yat-sen University,Guangzhou 510275,China [2]Key Laboratory of Optoelectronic Materials and Technologies,Sun Yat-sen University,Guangzhou 510275,China [3]Southern Marine Science and Engineering Guangdong Laboratory(Zhuhai),Zhuhai,519000,China [4]Department of Electronic Engineering,College of Information Science and

出　　处：《Light(Advanced Manufacturing)》2023年第4期167-182,共16页光（先进制造）（英文）

基　　金：supported by the National Key R&D Program of China under Grant(2019YFA0706301);the Key Project in Broadband Communication and New Network of the Ministry of Science and Technology(MOST)(2018YFB1801003);the National Science Foundation of China(NSFC)(U2001601,61975242,61525502,62175095,62375292);the Natural Science Foundation of Guangdong Province for Distinguished Young Scholars(2023B1515020028).

摘　　要：High-quality photonic materials are critical for promoting integrated photonic devices with broad bandwidths,high efficiencies,and flexibilities for high-volume chip-scale fabrication.Recently,we designed a home-developed chalcogenide glass(ChG)-Ge_(25)Sb_(10)S_(65)(GeSbS)for optical information processing chips and systems,which featured an ultrabroad transmission window,a high Kerr nonlinearity and photoelastic coefficient,and compatibility with the photonic hybrid integration technology of silicon photonics.Chip-integrated GeSbS microresonators and microresonator arrays with high quality factors and lithographically controlled fine structures were fabricated using a modified nanofabrication process.Moreover,considering the high Kerr nonlinearity and photoelastic effect of ChGs,we realised a novel ChG hybrid integrated chip,inspired by recent advances in integrated soliton microcombs and acousto-optic(AO)modulators.

关 键 词：Chalcogenide glasses Photonic integrated chips Soliton microcombs Acousto-optic interactions 

分 类 号：O43[机械工程—光学工程]