完全实现自主可控的国产光栅设计软件  

Fully Domestically Controlled Grating Design Software

作　　者：丁新辉 余惠 李大为[1] 张军勇[1] 王利[1] 周琼[1] 卢兴强[1] Ding Xinhui;Yu Hui;Li Dawei;Zhang Junyong;Wang Li;Zhou Qiong;Lu Xingqiang(National Laboratory on High Power Lasers and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Science,Beijing 100049,China)

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光物理联合实验室,上海201800 [2]中国科学院大学,北京100049

出　　处：《中国激光》2024年第14期264-274,共11页Chinese Journal of Lasers

基　　金：国家自然科学基金(62175245)。

摘　　要：通过对傅里叶模态法(也称严格的耦合波分析算法)的攻关与研究,介绍了一款国产的光栅设计与分析软件——光栅设计者。该软件独立开发,并完全自主可控,旨在填补国内光栅光学设计分析软件的空白。软件从算法开发与攻关开始,目前已取得了重大进展并即将发布。软件核心代码的自主率达到100%,与VirtualLab和Gsolver等国际主流光栅设计软件的计算精度相当,且支持更多光栅类型的设计与分析,包含一维、二维光栅及微结构和超表面等复杂光学结构。光栅设计者以简明的界面,表格化的参数输入,灵活多变的光栅结构建模,强大的参数扫描能力和高效的并行效率为特点,降低了用户的学习成本,适用于从极紫外到太赫兹波段的电磁场计算与分析。Objective The current application of domestic grating design software has long been dependent on commercial solutions such as VirtualLab and Gsolver. This reliance restricts the autonomy and innovation in the design of grating, metasurfaces, and microstructures. To meet the requirements of their design and analysis, there is an imperative need to fill the gap with domestic grating design software. The Grating Designer software, developed by Chinese researchers, not only satisfies the diverse requirements of grating and microstructure design, which ranges from modeling to analysis and optimization, but also has the ability to accelerate optimization and iterative convergence in the process of grating design.Methods The development of Grating Designer involves a comprehensive exploration of the Fourier modal method(FMM), also known as rigorous coupled wave analysis(RCWA), supported by thin element approximation, Gaussian elimination, matrix eigenvalue and eigenvector solving, matrix inversion, and other solution methods. The FMM serves as the analytical core, rigorously solving Maxwell equations within the periodic region of the grating. This method transforms the solution of Maxwell equations into determination of eigenvalues and eigenvectors. It applies them to the boundary conditions of the grating and substrate or medium regions, ultimately yielding results such as optical field, phase, and diffraction order. The software offers functionalities including construction, visualization, diffraction angle calculation, order calculation, diffraction efficiency analysis, reflection calculation,internal field calculation, transmission field calculation, and parameter scanning for 16 types of one-dimensional gratings and their derived two-dimensional gratings. The software development, driven by practical grating design and analysis requirements, features user-friendly tabular parameter input, simultaneous multi-parameter scan, and efficient parallel processing capabilities. Compared with mainstream grating design softw

关 键 词：光栅 光栅设计 光学设计 严格耦合波分析 超表面 微结构设计 

分 类 号：TN253[电子电信—物理电子学] TP311.52[自动化与计算机技术—计算机软件与理论]