基于光栅光谱合束的蓝光高亮度半导体激光源  

High⁃Brightness Blue Semiconductor Laser Source Based on Grating Spectral Beam Combining

作　　者：郭林辉[1,2] 蒋全伟[1,2] 吴华玲 谭昊[1,2] 谢鹏飞[1,2] 傅芸 张兰平 张永刚 高松信[1,2] 武德勇 唐淳[1,2] Guo Linhui;Jiang Quanwei;Wu Hualing;Tan Hao;Xie Pengfei;Fu Yun;Zhang Lanping;Zhang Yonggang;Gao Songxin;Wu Deyong;Tang Chun(Institute of Applied Electronics,China Academy of Engineering Physics,Mianyang 621900,Sichuan,China;Key Laboratory of High Energy Laser Science and Technology,Chinese Academy of Engineering Physics,Mianyang 621900,Sichuan,China)

机构地区：[1]中国工程物理研究院应用电子学研究所,四川绵阳621900 [2]中国工程物理研究院高能激光科学与技术重点实验室,四川绵阳621900

出　　处：《中国激光》2024年第13期44-50,共7页Chinese Journal of Lasers

基　　金：中国工程物理研究院发展基金(C-2023JMRH-LG)。

摘　　要：高功率高亮度蓝光半导体激光器正迅速发展为一种激光加工光源,其主要用于高反金属焊接、切割和雕刻。目前工业所用的蓝光半导体激光源在加工距离较大的一些工艺中表现出光束质量劣化和功率不足的现象,制约了光源的应用。提出外腔反馈光谱合束技术,该技术以激光自激振荡与外光反馈组合的方式输出合成光束,合成光束功率明显提高,光束质量与单元激光光束质量相当,弥补了工业加工中光束质量劣化和功率不足的缺陷。采用9个蓝光半导体激光单元,结合透射式光栅沿激光快轴方向进行光谱合束,输出功率为25.99 W,电光转换效率为21.67%,横向光束质量因子(M_(x)^(2))和纵向光束质量因子(M_(y)^(2))分别为2.45和14.81,亮度为56.85 MW/(cm^(2)·sr)。Objective High power and brightness blue semiconductor lasers are being rapidly developing into a type of laser processing light source, mainly used for high reflectivity metal welding, cutting, and engraving. Due to the degradation of beam quality and insufficient power of blue semiconductor laser sources in some processes with large processing distances, their application in this field is restricted. Therefore, the use of various beam combining techniques to improve output power and brightness has been widely studied. Laser beam combining methods include spatial, polarized, and spectral beam combining. Spectral beam combining is achieved through the non-coherent superposition principle of dispersion elements, and the beam quality after beam combining is equivalent to that of a single subunit beam, which has an effective power scaling advantage. In this study, an external cavity feedback spectral beam combining technique that combines self-excited oscillation with external optical feedback is used to obtain a laser beam output. The output power and beam quality are significantly improved, compensating for the shortcomings of poor beam quality and insufficient power in the industrial processing by blue semiconductor lasers.Methods A multi-laser-unit spectral beam combining structure is designed based on a transmission grating(Fig. 1). First, the laser optical, packaging structure, and optical transformation lens parameters in the beam combining system are designed based on the principle of grating diffraction. According to the designed optical structure, nine blue semiconductor laser units are grouped along the fast axis direction, and the pointing accuracy and divergence angle are tested. Second, spectral beam combining experiments are conducted, and the crosstalk effect in beam combining is analyzed and studied. A method of using a beam reduction system to suppress the crosstalk effect is proposed, and the results are tested. Finally, parameters such as central wavelength, spectral width, output power, and beam

关 键 词：半导体激光器 蓝色激光 光谱合束 高光束质量 高亮度 

分 类 号：TN248.4[电子电信—物理电子学]