Herriott型气体池的反射镜装配公差影响分析  

Influence Analysis of Mirror Assembly Error in Herriott Gas Cell

作　　者：周新雨 胡源[1] 刘子龙 关禹聪 Zhou Xinyu;Hu Yuan;Liu Zilong;Guan Yucong(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130012,Jilin,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130012

出　　处：《光学学报》2024年第13期222-230,共9页Acta Optica Sinica

基　　金：吉林省教育厅科技基金(JJKH20210814KJ)。

摘　　要：基于Herriott型气体池的基本原理以及ABCD矩阵的扩展矩阵,分析了对气体池参数产生影响的公差类型,建立了两反射镜间距、倾斜以及偏心公差的数学模型。最后,仿真分析了不同等效光程下,公差对出射光能量利用率的影响。所提出的数学模型和分析方法可用于任意单环Herriott型气体池,并且便于在实际气体池的设计中针对不同的等效光程给出合理的两镜间距、倾斜以及偏心公差的允许变动量,这对气体池的工程实现具有重要的理论意义。Objective The Herriott cell is an optical system composed of two concave mirrors, and features stable light paths and simple structures. However, as industrial demands for design specifications become increasingly stringent, the power efficiency loss in the cell assembly is more pronounced. Currently, there is a lack of a systematic theoretical model as academic support for this problem. Thus, our study is based on the fundamental principles of the Herriott cell and the extended matrix of the ABCD matrix, analyzing the types of tolerances that affect the cell parameters. Mathematical models for the tolerances of two mirror distances, tilt, and eccentricity are built. Finally, a simulation analysis is conducted on the influence of tolerances on the exit light power utilization under different equivalent optical paths. The proposed mathematical models and analysis methods can be applied to any single-ring Herriott cell and provide reasonable allowable variations for two mirror distances, tilt, and eccentricity tolerances in the design of practical cells. Meanwhile, significant theoretical implications are provided for the engineering implementation of cells.Methods First, the Herriott theory is employed to deduce the sizes of all light spots in the cell, laying the groundwork for subsequent theory and analysis. Second, based on the fundamental principles of the Herriott cell and the extended matrix of the ABCD matrix, we build mathematical models for the most critical two mirror distances, tilt, and eccentricity in the assembly tolerances of the Herriott cell. The calculation formulas for the above assembly tolerances can be adopted to compute the position information of all light spots in the Herriott cell under error occurrence. Third, since the light source in our study is assumed to be uniform, the utilization rate of exit light power is calculated using the ratio of residual light spot area to original light spot area. Fourth, the effects of assembly tolerances on the change in light spot positions in the Herr

关 键 词：Herriott型气体池 ABCD矩阵 数学模型 公差分析 

分 类 号：O435[机械工程—光学工程]