超精密车削中精度层次渐进的两步对刀法  

Two-Step Tool Setting Method with Progressive Accuracy Levels in Ultra-Precision Turning

作　　者：陈顺发 王佳宁 刘畅 薛志鹏 李明志 肖皓维 张雷 Chen Shunfa;Wang Jianing;Liu Chang;Xue Zhipeng;Li Mingzhi;Xiao Haowei;Zhang Lei(Chang Guang Satellite Technology Co.,Ltd.,Changchun 130000,Jilin,China)

机构地区：[1]长光卫星技术股份有限公司,吉林长春130000

出　　处：《光学学报》2024年第13期231-239,共9页Acta Optica Sinica

基　　金：吉林省科技厅重点研发项目(20220201029GX);中国博士后科学基金(2022M710487)。

摘　　要：为了进一步提高单点金刚石超精密车削的加工精度,满足现代光学元件对高精度制造的要求,对单点金刚石超精密车削过程中高精度的对刀方法进行研究。基于车削加工原理分析创成光学元件时对刀误差对加工表面面形精度的影响。结合传统对刀方法以及误差影响理论分析,提出一种精度层次渐进的两步对刀法,以减小或彻底消除对刀误差,进一步提高加工精度。实验结果表明:相较于传统对刀法,采用所提出的精度层次渐进的两步对刀法对刀所加工出的球面反射镜表面面形均方根(RMS)值和峰谷(PV)值分别降低了52.03%和58.86%,证明高精度的对刀方法是实现光学元件超精密车削加工的重要前提。为提高光学表面车削精度所提出的精度层次渐进的两步对刀法是有效的。Objective The traditional circular groove tool matching method which requires two trial cuts to complete tool matching in the height direction and feed direction is not efficient. Meanwhile, experience in first-line machining shows that the Zdirection cutting depth error can affect the circular groove width. Additionally, the measurement results of the circular groove width are not unique true values, with significant selection errors introduced to the fitting and data processing. This method may result in tool alignment errors of several micrometers, making the ultra-precision turning accuracy of optical components unable to meet the accuracy requirements. Therefore, our tool alignment method aims at further improving the machining accuracy of single-point diamond ultra-precision turning, thus meeting the high-precision manufacturing requirements for optical components.Methods Firstly, based on the turning machining principle, we analyze the influence of tool setting errors on the surface shape accuracy of the machined optical components. Meanwhile, theoretical analysis of the factors that affect the shape of the surface error curve is conducted to determine the curve shape that different types of surfaces will exhibit under different tool alignment errors, with the relationship between curve shape and tool alignment error size presented. Secondly, many fundamental errors in traditional tool alignment methods result in tool alignment errors of several micrometers in production practices, making the ultra-precision turning accuracy of optical components unable to meet the accuracy requirements.Therefore, we theoretically analyze the shortcomings of traditional circular groove cutting methods and optimize them.Then, based on the analysis results of error influence theory and the optimized circular groove tool matching method, a tool matching method of two-step progressive precision level is designed and the overall processing flow is solidified to improve production efficiency. Finally, we carry out experiments to

关 键 词：光学设计 单点金刚石车削技术 对刀误差 光学表面 两步对刀法 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]