基于叠栅条纹投影成像的差动式光栅位移测量系统  

Differential Motion Grating Displacement Measurement System Based on Moiré Fringe Projection Imaging

作　　者：姚云飞 高旭[1] Yao Yunfei;Gao Xu(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《光学学报》2024年第14期135-143,共9页Acta Optica Sinica

基　　金：吉林省科技厅自然科学基金面上项目(20230101217JC)。

摘　　要：为突破传统光栅位移测量系统依赖四裂相正弦波光电信号测量的局限,提出了一种基于叠栅条纹投影成像的差动式光栅位移测量方法。根据光栅偏振光干涉原理,利用图像处理方法和叠栅条纹的位移放大特性,规避了当前光栅的加工水平对高精度位移测量的限制,设计了叠栅条纹投影成像的高分辨率单光栅位移光学感知系统,实现了4倍光学细分位移信号的获取,并利用CMOS图像探测器完成了位移信号的图像式转换。推导了图像式位移感知信号的数学模型,从叠栅成像的光学机理出发,对光栅这一核心元件的刻划误差、平整度误差、装调误差等进行了具体的解算,并对系统进行了仿真模拟和设计性能的分析,进一步阐述了系统动态工作的最大允许速度与帧率之间的关系,在0.048 mm/s的最大允许速度下,该系统的基础分辨率可达2.075μm,细分后分辨率可达纳米/亚纳米量级。Objective With the continuous progress in semiconductor chip manufacturing processes, nanoscale-precision measurement technology has become an urgent scientific research problem to be solved. Grating displacement measurement technology has attracted the attention of domestic and foreign researchers owing to its high accuracy,robustness, and other advantages. In recent years, research on grating displacement measurement systems has continued,but some problems remain. Most systems use four split-phase sine-wave photoelectric signals for displacement measurement, which requires the introduction of a large number of optical components in the optical path, making it difficult to miniaturize the system. With this method, it is difficult to break the limitations of the grating processing level,and the demodulation error of phase edge information is also relatively large. In addition, the matching high frequency subdivision technology and subdivision error correction technology are relatively mature, making it difficult to continue improving the system resolution and accuracy. To further improve the resolution and accuracy of the grating displacement measurement system and achieve miniaturization of the system, this paper proposes a differential grating displacement measurement system based on Moiré fringe projection imaging.Methods Image-based measurement systems based on the principle of grating polarized light interference have various advantages, and the traditional photoelectric conversion systems can be transformed into digital image processing systems.The use of image processing methods with the displacement amplification characteristics of Moiré fringes avoids the limitations of current grating processing systems for high-precision and high-resolution displacement measurements.Improving system measurement accuracy and resolution while reducing the use of multiple spectroscopic prisms makes miniaturization easier.Results and Discussions A high-resolution single-grating displacement optical sensing system was des

关 键 词：物理光学 光栅位移测量系统 叠栅条纹投影成像 相移 

分 类 号：TH741[机械工程—光学工程]