基于喷墨打印的绿色量子点颜色转换层的工艺与性能优化  

Process and Performance Optimization of Green Quantum Dot Color Conversion Layer Based on Inkjet Printing

作　　者：王昕怡 周浩杰 嵇啸啸 杨铸 李建新[1,2] 殷录桥 张建华[1,2] Wang Xinyi;Zhou Haojie;Ji Xiaoxiao;Yang Zhu;Li Jianxin;Yin Luqiao;Zhang Jianhua(School of Microelectronics,Shanghai University,Shanghai 20044,China;Key Laboratory of Advanced Display and System Applications,Ministry of Education,Shanghai University,Shanghai 200072,China;School of Materials Science and Engineering,Shanghai University,Shanghai 200444,China)

机构地区：[1]上海大学微电子学院,上海200444 [2]上海大学新型显示技术及应用集成教育部重点实验室,上海200072 [3]上海大学材料科学与工程学院,上海200444

出　　处：《光学学报》2024年第14期267-276,共10页Acta Optica Sinica

基　　金：国家重点研发计划(2022YFB3603502)。

摘　　要：本文研究了无滤光片、无分布式布拉格反射镜的条件下,喷墨打印技术(IJP)在高分辨率微型发光二极管(MicroLED)上沉积量子点颜色转换(QDCC)层的应用。通过采用固含量为20%(质量分数)的高质量分数(>10%)量子点墨水,并经过工艺优化,成功实现了均匀且可重复的超厚(>10μm)量子点层沉积。在经过反应离子刻蚀(RIE)处理的挡光黑色矩阵(BM)层上,利用喷墨打印技术,实现了不同厚度绿色量子点膜层的精准沉积,子像素尺寸为40μm×40μm,线宽为5μm。绿色QDCC层表现出优异的性能,最大亮度达到159120.4 cd/cm^(2),相关色温(CCT)为5844.463 K,外量子效率(EQE)为3.11%。随着厚度的增大,CIE(x,y)色坐标从初始值(0.1853,0.2537)变化到最终值(0.2234,0.7252)。Objective In recent years,Micro-LED technology has garnered significant attention due to its outstanding characteristics such as high brightness,high contrast,wide color gamut,fast response time,and high energy efficiency.However,achieving full-color Micro-LED displays remains a challenge.The color conversion layer is considered the most effective solution to address this challenge.While traditional phosphors and perovskite materials have been explored for fullcolorization,they are encumbered by inherent limitations.Quantum dot(QD) has been introduced as the material for the color conversion layer in this field.As excellent semiconductor nanomaterials,QD holds promise in addressing issues of low color purity and brightness in traditional display technologies.Inkjet printing(IJP) technology,with its precision,costeffectiveness,and rapid prototyping capabilities,offers a novel approach for fabricating quantum dot color conversion(QDCC) layer on high-resolution Micro-LED displays.However,literature on the fabrication of ultra-thick(>10μm)QDCC layer using IJP is relatively limited.Therefore,we propose a method for fabricating ultra-thick QDCC layer using high-concentration green QD ink via IJP,without the incorporation of any filtering layer.The resulting color conversion layer devices demonstrate exceptional brightness and color saturation.These findings underscore the significant potential of ultra-thick color conversion layers prepared with high-concentration QD ink for Micro-LED displays,offering costeffectiveness and paving the way for further advancements in Micro-LED technology.Methods We utilize Tracepro optical simulation software to analyze the optical crosstalk of the QDCC layer,facilitating the determination of the optimal distance between the LED and the black matrix(BM),as well as the line width of the BM.Through research and optimization of lithography and IJP processes,a uniform and repeatable QD film is successfully achieved.A green CdSe/ZnS QD ink,with a solid content of 20%(mass fraction),is utili

关 键 词：光学器件 喷墨打印 微型发光二极管 颜色转换层 量子点 

分 类 号：TN383.2[电子电信—物理电子学]