芯片测试厂房液氮供应系统设计要点分析  

Analysis of Design Points for Liquid Nitrogen Supply System in Chip Testing Building

作　　者：商丹 徐立 Shang Dan;Xu Li(The IT Electronics Eleventh Design&Research Institute Scientific and Technological Engineering Corporation Limited.,Chengdu 610000,China)

机构地区：[1]信息产业电子第十一设计研究院科技工厂股份有限公司,四川成都610000

出　　处：《化工设计》2024年第4期31-34,1,共5页Chemical Engineering Design

摘　　要：在芯片低温测试过程中,需要用到液氮来进行变温测试。由于测试过程对液氮的流量、压力要求较为严苛,因此,整个液氮供应系统应该从设计上严格把控。本文针对目前芯片测试厂房中的液氮供应系统设计、设备选型、选材等方面进行简要探讨。In the process of low temperature test of chips,liquid nitrogen is required for temperature change test.Due to the strict requirements for the flow rate and pressure of liquid nitrogen during the testing process,the entire liquid nitrogen supply system should be strictly controlled from a design perspective.This paper briefly discusses the design,equipment selection and material selection of liquid nitrogen supply system in current chip testing building.

关 键 词：芯片低温测试 液氮系统 系统设计 

分 类 号：TB21[一般工业技术—工程设计测绘]