一种柔性栅丝薄膜传感器设计制造及其灵敏性分析研究  

Development and sensitivity analysis on the flexible grid wire thin film sensor

作　　者：王龙飞 Wang Longfei(School of Mechanical Engineering,Shaanxi Institute of Technology,Shaanxi Xi'an,710300,China)

机构地区：[1]陕西国防工业职业技术学院机械工程学院,陕西西安710300

出　　处：《机械设计与制造工程》2024年第9期21-27,共7页Machine Design and Manufacturing Engineering

基　　金：陕西国防工业职业技术学院2021年重点项目(Gfy21-12);陕西省教育厅2023年度科学研究计划项目(23JK0320)。

摘　　要：为提高柔性传感器在高温高应力等恶劣条件下的适应性和稳定性,基于有限元法设计制造了一种柔性栅丝薄膜传感器。建立传感器有限元模型,通过栅丝宽度、栅丝间距和栅丝数量3个尺寸参数对结构进行模拟分析,研究均布应力条件下栅丝的受力与变形,结果显示增大栅丝宽度可线性降低栅丝的应变21.06%;栅丝数量对结构的最大应力比较敏感,最大应力增大57.80%;栅丝宽度、栅丝间距和栅丝数量对中心点的最大位移影响均较小,栅丝间距变化对中心点位移变化最大误差为2.49%。同时分析了传感器的温敏效应,结果表明随着温度增加,传感器的灵敏度线性增大,灵敏度变化范围为0.160244~0.173373 mm/MPa,差值为7.57%。该研究为柔性栅丝薄膜传感器的设计与制造提供了参考,具有一定的实际意义。A flexible grid wire thin film sensor is designed and manufactured based on the finite element method to address the adaptability and stability of flexible sensors under harsh conditions such as high temperature and high stress.A finite element model is established to simulate and analyze the structure from three dimensions:grid wire width,grid wire spacing,and grid wire quantity,the stress and deformation of the wire under uniformly distributed stress conditions are studied,the results show that increasing grid wire width can linearly reduce the strain of the grid wire by 21.06%;The grid wire quantity is relatively sensitive to the maximum stress of the structure,reaching 57.80%;The grid wire width,grid wire spacing,and grid wire quantity have a relatively small impact on the maximum displacement of the center point,the maximum error of the displacement change of the center point due to the variation of grid wire spacing is 2.49%.At the same time,the temperature sensitive effect of the sensor is analyzed,and the results show that as the temperature increased,the sensitivity of the sensor increases linearly,with a sensitivity range of 0.160244 mm/MPa to 0.173373 mm/MPa,and an error of about 7.57%,the above research provide a reference for the design and manufacturing of flexible grid wire thin film sensors,and have certain practical significance.

关 键 词：薄膜传感器 栅丝 有限元分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]