1.90~2.10 μm吸收型带通滤光片的研制  

Development of 1.90-2.10μm Absorption Bandpass Filters

作　　者：张翔 张薇 ZHANG Xiang;ZHANG Wei(Shaanxi Huaxing Electronics Group Co.Ltd.,Xianyang 712099,China)

机构地区：[1]陕西华星电子集团有限公司,陕西咸阳712099

出　　处：《真空电子技术》2024年第4期76-80,85,共6页Vacuum Electronics

摘　　要：介绍了1.90~2.10μm吸收型带通滤光片的设计与优化理论、制备中的工艺参数改进以及产品的测试方法。选用Ge、SiO作为高、低折射率镀膜材料,匹配等效折射率的方式在膜系中添加匹配层,使用TFCalc软件优化膜系,平滑消除陷波。研制出了中心波长为2.0μm时通带内透过率大于92%,在截止带1.0~1.60μm处和2.50~3.89μm处的平均透过率小于0.8%,10层、2798 nm总厚度的1.90~2.10μm吸收型带通滤光片。该种滤光片膜层数少、厚度小,能够显著缩短滤光片的真空制备时间,提高了膜层控制精度,满足了批量化生产的需求。The design and optimization theory,the process parameter improvements in preparation,and the product testing methods of 1.90-2.10μm absorption bandpass filters are introduced.Ge and SiO are selected as high and low refractive index coating materials,respectively,and a matching layer is added to the film system by matching the equivalent refractive index.The TFCalc software is used to optimize the film system and smoothly eliminate the notch.A 1.90-2.10μm absorption bandpass filter with 10 layers and a total thickness of 2798 nm is developed,with a passband transmittance greater than 92%at a center wavelength of 2.0μm and an average transmittance of less than 0.8%at cutoff bands of 1.0-1.60μm and 2.50-3.89μm.This type of filter film has fewer layers and a smaller thickness,which can significantly shorten the vacuum preparation time of the filter,improve the control accuracy of the film layer,and meet the needs of mass production.

关 键 词：中心波长2.0μm 带通滤光片 等效折射率 匹配层 膜系设计 工艺参数 

分 类 号：TN12[电子电信—物理电子学]