基于合束的500 W蓝光半导体激光模块化研究  

Research on modularization of 500 W blue semiconductor laser based on beam combination

作　　者：胡烜瑜 郑皞翾 郑毅 段长城 肖瑜[1] 徐刚 唐霞辉[1] HU Xuanyu;ZHENG Haoxuan;ZHENG Yi;DUAN Changcheng;XIAO Yu;XU Gang;TANG Xiahui(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学光学与电子信息学院,武汉430074

出　　处：《激光技术》2024年第4期470-476,共7页Laser Technology

摘　　要：为了满足新能源汽车电池制造、航空航天高反射材料铜的焊接和金属3-D打印领域的应用需求,采用空间合束以及偏振合束方法,研制出基于150 W阵列式蓝光单元的500 W蓝光半导体激光模块。实现了快轴上发光单元内部的光束叠加、慢轴上多个发光单元交叉加密输出,消除发光死区,将4个独立发光单元的激光合束为一个方形光斑,增加功率密度而不影响光束质量;并研究了激光模块热效应与冷却特性,设计出激光模块稳定输出方案。结果表明,最终输出蓝光激光快轴发散角0.4°,慢轴发散角0.02°,发光功率501 W,整体效率81.3%,功率波动小于0.7%。本研究成果为进一步研制4 kW大功率蓝光半导体激光器提供了基本合束模块。In order to meet the needs in thigh-reflecting copper welding and metal 3-D printing in aerospace and new energy vehicle battery manufacturing,a 500 W blue semiconductor laser module based on four 150 W array blue light units was developed by using spatial beam combining and polarization beam combining methods.Spatial beam combining technology has been used to independently compress the spot on the fast and slow axis to eliminate luminescent dead zone.Using polarization beam combining technique,we can successfully combine 4 independent light-emitting arrays into one single beam,increasing power density without deteriorating the beam quality or the divergence angle.In addition,a specific water-cooling system for the blue laser module was designed to meet the stability working condition for various industrial applications.Finally,thanks to the method above with the beam combining efficiency of 81.3%,a 501 W output with power fluctuations less than 0.7%,a fast(slow)-axis divergence angle of 0.4°(0.02°)has been obtained.In the follow-up research,one may expect the development of 4 kW-level high-power blue semiconductor lasers with coupled in optical fiber for output.

关 键 词：激光光学 蓝光半导体激光器 光束整形 空间合束 偏振合束 

分 类 号：TN242[电子电信—物理电子学] TN248.4