二维激光跟踪转台轴系设计及动态形变误差修正  

Shafting design and dynamic deformation error correction of two-dimensional laser tracking turntable

作　　者：霍汉林 王劲松[1] 王国名 李根梓 周维虎 HUO Hanlin;WANG Jinsong;WANG Guoming;LI Genzi;ZHOU Weihu(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100094,China;University of Chinese Academy of Sciences,Beijing 100049,China;Yanqi Lake Institute of Basic Manufacturing Technology(Beijing)Co.,Ltd.,Beijing 101407,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中国科学院微电子研究所,北京100094 [3]中国科学院大学,北京100049 [4]雁栖湖基础制造技术研究院(北京)有限公司,北京101407

出　　处：《光学精密工程》2024年第14期2200-2210,共11页Optics and Precision Engineering

基　　金：国家重点研发项目(No.2022YFB3403800);吉林省重点科技研发项目(No.20180201025GX)。

摘　　要：二维激光跟踪转台轴系结构的稳定性及动态形变误差补偿精度是激光跟踪仪实现高精度动态坐标测量的关键因素。为满足激光跟踪仪动态坐标测量高精度、高稳定的实际需求,本文研制了一套基于过定位双角接触轴承对轴系的二维转台。首先,基于转台性能指标要求开展二维转台轴系设计及精度分析;然后,基于所设计结构及现有装配工艺,结合弹性力学理论,开展转台动态形变误差形成机理分析,并通过刚柔耦合动力学仿真分析验证理论分析合理性。最后,提出基于共轭差动式光学自准直原理的轴系动态误差测量方法,完成对轴系稳定性和动态形变误差的测量补偿。实验结果表明:转台的动态形变误差重复性优于±0.6″,动态形变误差由补偿前的±7″降低为±1″,转台设计的稳定性和动态形变误差补偿精度满足设计需求。The stability of shafting structure and the compensation accuracy of dynamic deformation error are the key factors for laser tracker to achieve high-precision dynamic coordinate measurement.To fulfill the stringent requirements of high precision and stability in dynamic coordinate measurement,a two-dimen⁃sional turntable based on an over-positioned double angular contact bearing shafting system has been devel⁃oped.Initially,the design and precision analysis of the two-dimensional turntable shafting were conducted based on the performance specifications of the turntable.Subsequently,based on the designed structure,existing assembly techniques and the theory of elasticity,the mechanism of the dynamic deformation error of the turntable was analyzed,and the rationality of the theory was verified through rigid flexible coupling dynamics simulation.Finally,a method for measuring shafting dynamic errors based on the symmetric dif⁃ferential optical self-collimation principle was proposed to achieve the measurement and compensation of shafting stability and dynamic deformation errors.The two-dimensional laser tracking turntable,as a cru⁃cial component of laser trackers to achieve high-precision dynamic coordinate measurements.Experimen⁃tal results demonstrate that the repeatability of the turntable's dynamic deformation error is superior to±0.6″,and the dynamic deformation error has been reduced from±7″to±1″after compensation.The stability and dynamic deformation error compensation accuracy of the designed turntable meet the require⁃ments.

关 键 词：激光跟踪仪 二维激光跟踪转台 轴系精度 动态形变误差 光学自准直 

分 类 号：TH74[机械工程—光学工程]