考虑温度因素对带有柔性结构的静压气体轴承稳定性影响研究  

Study on the influence of temperature on the stability of aerostatic bearing with flexible structure

作　　者：赵晓龙[1] 张伟超 孙广伟 苗张仪 董皓[1] ZHAO Xiaolong;ZHANG Weichao;SUN Guangwei;MIAO Zhangyi;DONG Hao(College of Mechanical and Electrical Engineering,Xi'an Technological University,Xi'an 710021,China)

机构地区：[1]西安工业大学机电工程学院,陕西西安710021

出　　处：《光学精密工程》2024年第14期2236-2246,共11页Optics and Precision Engineering

基　　金：国家自然科学基金(No.52305501,No.523750621);陕西省自然科学基础研究计划(No.2023-JC-QN-0502);西安市科技计划项目(No.22GXFW0048);西安市未央区科技计划项目(No.202204)。

摘　　要：为了研究静压气体轴承在工作状态下,温度对带有柔性结构的静压气体轴承柔性结构挠度变形量、流场流态及稳定性的影响规律,本文建立了带有柔性结构的静压气体止推轴承三维(3D)模型。首先,采用流-固-热多物理场耦合的计算方法,分析了工作状态下温度变化对静压气体轴承柔性结构挠度变形量、气膜流场流态及气膜稳定性的影响。然后,通过设计静压气体轴承试验台,对轴承受到载荷冲击时的振动情况进行测试,将测试结果与仿真分析结果对比,验证了仿真计算的可靠性。计算结果表明,环形柔性薄板在节流孔处的挠度变形量随温度升高而增大,当气膜间隙h=12μm的情况下,工作温度T=100℃相较于工作温度T=-20℃的挠度变形量提升了43%;其他条件相同下,随着温度的升高,气膜内气旋的范围逐渐减小;工作温度越高,受到载荷后轴承振动幅度越小。实验测试结果表明,随着工作温度的升高,轴承稳定性越高,与仿真分析结果基本一致。该研究为此类轴承在超精密领域的应用提供了理论参考。In order to study the influence of temperature on the deflection deformation,flow pattern and stability of the flexible structure of aerostatic bearing with flexible structure under the working state of aero⁃static bearing,a three-dimensional(3D)model of aerostatic thrust bearing with flexible structure was es⁃tablished in this paper.Firstly,the influence of temperature change on the deflection deformation of the flexible structure of aerostatic bearing,the flow pattern of gas film flow field and the stability of gas film were analyzed by using the calculation method of fluid solid thermal multi physical field coupling.Then,through the design of aerostatic bearing test-bed,the vibration of the bearing under the impact of load is tested,and the test results are compared with the simulation analysis results to verify the reliability of the simulation calculation.The calculation results show that the deflection deformation of the annular flexible thin plate at the orifice increases with the increase of temperature,and when the film gap h=12μm,the deflection deformation of T=100℃is 43%higher than that of T=-20℃;Under the same other condi⁃tions,with the increase of temperature,the range of cyclone in the air film gradually decreases;The high⁃er the working temperature,the smaller the vibration amplitude of the bearing after being loaded.The ex⁃perimental results show that with the increase of working temperature,the stability of the bearing is high⁃er,which is basically consistent with the simulation results.This study provides a theoretical reference for the application of aerostatic bearing in the field of ultra precision.

关 键 词：静压气体轴承 温度 流-固-热耦合 稳定性 计算流体力学 

分 类 号：TH133.36[机械工程—机械制造及自动化]