多光谱硫化锌光学窗口离子束抛光工艺研究及参数优化  

Ion beam polishing process parameters optimization and polishing experiment of ZnS

作　　者：蔡根 朱蓓蓓 秦琳 张楚鹏 陈肖 CAI Gen;ZHU Beibei;QIN Lin;ZHANG Chupeng;CHEN Xiao(Key Laboratory of Modern Manufacturing Quality Engineering in Hubei Province,Hubei University of Technology,Wuhan430068,China;Shanghai Aerospace Control Technology Institute,Shanghai 201109,China)

机构地区：[1]现代制造质量工程湖北省重点实验室,湖北工业大学,湖北武汉430068 [2]上海航天控制技术研究所,上海201109

出　　处：《光学精密工程》2024年第14期2247-2255,共9页Optics and Precision Engineering

基　　金：硬脆光学元件激光辅助超精密加工机理与工艺(No.IMETKF2023008);现代制造质量工程湖北省重点实验室开放基金资助(No.KFJJ-2022006)。

摘　　要：多光谱硫化锌因其在近、中、远红外等多个光谱波段具有较高的光学透率,广泛应用于红外光学制导导引头、光电探测雷达、机载光电吊舱。为了获得超高面形精度的多光谱硫化锌光学元件,并提高离子束抛光效率,采用正交实验方法对硫化锌进行离子束单点刻蚀实验,获取各工艺参数下的去除函数特征量及体积去除率。通过对正交实验数据进行直观法分析和极差法分析,以体积去除率最大为目标进行工艺参数优化,获得的优化工艺参数组合为:离子束流电压1100 V、射频功率110 W、加速电压200 V、氩气流量7 sccm、加工距离30 mm。通过调控工艺参数获得不同的离子束束斑直径对口径为80mm硫化锌进行组合抛光,加工后的硫化锌面形精度PV值由467 nm下降到了71.506 nm、RMS值由112 nm下降到10.758 nm。以上实验结果表明,采用大、小束径离子束组合能够有效提升多光谱硫化锌光学元件的加工效率和面型精度。Multispectral zinc sulfide is widely used in infrared optical guidance seeker,photoelectric detec⁃tion radar and airborne photoelectric pod because of its high optical transmittance in near,middle and far in⁃frared spectral bands.In order to obtain multi-spectral ZnS optical element with ultra-high surface shape accuracy and improve ion beam polishing efficiency,the orthogonal experiment method was used to carry out ion beam single point etching experiments on ZnS,and the removal function characteristics and volume removal efficiency were obtained under each process parameter.Through direct analysis of orthogonal experimental data and range analysis,the process parameters were optimized with the target of maximum vol⁃ume removal rate.The optimized process parameters were obtained as follows:ion beam voltage 1100 V,radio frequency power 110 W,acceleration voltage 200 V,argon flow rate 7 sccm,and processing dis⁃tance 30 mm.By adjusting the process parameters,different ion beam spot diameters were obtained for combined polishing of 80 mm diameter zinc sulfide.After processing,the surface shape accuracy of zinc sulfide decreased from 467 nm to 71.506 nm and from 112 nm to 10.75 nm.The above experimental re⁃sults show that the combination of large and small diameter ion beams can effectively improve the process⁃ing efficiency and surface shape accuracy of multi-spectral ZnS optical elements.

关 键 词：硫化锌 离子束抛光 去除函数 工艺优化 极差分析 

分 类 号：TQ163[化学工程—高温制品工业] TN249[电子电信—物理电子学]