偏振可调谐式剪切干涉的大畸变波前实时重构  

Polarization-tunable shearing interferometry method for real-time reconstruction of large aberration wavefronts

作　　者：卞点 骆雅婷 侯登峰 罗哉[1] BIAN Dian;LUO Yating;HOU Dengfeng;LUO Zai(College of Metrology Measurement and Instrument,China Jiliang University,Hangzhou 310018,China)

机构地区：[1]中国计量大学计量测试与仪器学院,浙江杭州310018

出　　处：《光学精密工程》2024年第15期2325-2333,共9页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.52075511)。

摘　　要：为了实现对大畸变波前的实时测量,基于紧凑稳定的剪切干涉结构,提出一种偏振式单帧波前重构方法,有效克服传统横向剪切需要两幅或以上的图像梯度整合缺陷,实时重构大畸变待测样本波前的形貌。以无限共轭模型为理论基础进行仿真分析,对生成的大畸变波前样本进行计算重构,验证该优化算法的可行性。在此基础上,搭建双平面镜可调谐剪切干涉共轭结构,结合偏振器件,以分辨率目标靶作为待测对象,对所提算法进行实验验证,实现入射光场波前的实时条纹分离和波前重构。实验结果表明,所提单帧波前法重构样本波面的均方根误差为60 nm,算法运行时间有效提升至0.11 s。所提偏振剪切式光学设计以及单帧波前重构算法,作为一种自干涉剪切方法,无需多幅图像的重建程序,简化横向剪切干涉的实验结构,提高宏微观样本三维形貌的检测效率,在光学定量相干干涉测量领域具有一定的应用潜力。This paper introduces a polarization-based single-frame wavefront reconstruction method using a compact and stable shear interferometry structure for real-time measurement of large aberration wavefronts.This approach overcomes the need for multiple images in traditional lateral shear interferometry,allowing real-time reconstruction of large aberration samples.The method is theoretically supported by simulations based on an infinite conjugate model,and computational reconstruction of large aberration wavefront samples confirms the algorithm's feasibility.A dual-plane mirror tunable shear interferometry structure,combined with polarization devices,is experimentally validated using a resolution target,achieving real-time fringe separation and wavefront reconstruction.The results show high accuracy with a root mean square error of 60 nm and improved runtime of 0.11 s.The proposed design and algorithm eliminate the need for multiple image reconstruction,simplify lateral shear interferometry,improve detection efficiency of three-dimensional macro and micro samples,and have potential applications in optical quantitative coherent interferometric measurement.

关 键 词：剪切干涉 波前检测 大畸变 实时重构 偏振调控 

分 类 号：O43[机械工程—光学工程] TH691.9[理学—光学]