机器人抛光M-ZnS去除函数建模与工艺参数优化  

Modeling of removal function and optimization of process parameters for robotic polishing M-ZnS

作　　者：臧艺凯 朱蓓蓓 秦琳 尚瑶 尚俊豪 佘中迪 陈肖 肖峻峰[1] 许剑锋[1] ZANG Yikai;ZHU Beibei;QIN Lin;SHANG Yao;SHANG Junhao;SHE Zhongdi;CHEN Xiao;XIAO Junfeng;XU Jianfeng(School of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China;Shanghai Aerospace Control Technology Research Institute,Shanghai 201108,China;School of Mechanical Engineering,Hubei University of Technology,Wuhan 430068,China)

机构地区：[1]华中科技大学机械科学与工程学院,湖北武汉430074 [2]上海航天控制技术研究所,上海201108 [3]湖北工业大学机械工程学院,湖北武汉430068

出　　处：《光学精密工程》2024年第15期2387-2400,共14页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.52225506)。

摘　　要：为研究M-ZnS在机器人抛光过程中的材料去除模型和优化参数组合,探究M-ZnS光学元件的高精度、低成本、批量化制造方案,采用有限元法和数值仿真法,对M-ZnS的机器人抛光材料去除函数模型进行修正。基于有限元法建立了抛光盘的压力分布模型,采用曲线拟合方法得到了压力分布函数。仿真模型和实验数据对比表明,去除函数模型与实验数据中心相对偏差小于8%,证实了修正去除函数模型的有效性。然后,对抛光关键工艺参数进行优化,通过单因素实验法,获得了机器人抛光M-ZnS的优化工艺参数组合:对于10 mm的沥青盘,推荐压力为0.12~0.18 MPa,推荐的转速比为200/-10~200/-50 r/min。最后,采用修正的去除函数模型和优化工艺参数对100 mm口径的M-ZnS平面光学元件进行抛光,并对抛光前后的表面粗糙度和面形精度进行测量和对比。实验结果表明,经过单轮80.39 min抛光,表面质量明显提高,元件淡黄色逐渐褪去,表现为透明材料,面形PV从0.668μm降至0.229μm,收敛率为65%,表面粗糙度Sa从7.911 nm降低至2.472 nm,收敛率为68%。机器人抛光技术可作为M-ZnS光学元件高效高质量加工的重要手段。To study and optimize the material removal model for robotic polishing of M-ZnS and enhance the precision and cost-effectiveness of manufacturing M-ZnS optical components,the material removal model is refined using the finite element method and numerical simulation.A pressure field distribution model for a 10 mm asphalt polishing disc is developed,and the pressure distribution function is determined through curve fitting.The accuracy of the adjusted removal function model is verified with a less than 8%deviation when comparing simulation and experimental data.The polishing process parameters are optimized using a one-factor experimental method,suggesting a pressure range of 0.12 to 0.18 MPa and spindle speed ratios of 200/-10 to 200/-50 r/min for 10 mm discs.These optimizations were applied to polish 100 mm M-ZnS planar optical elements.Post-polishing,the surface quality significantly improved within 80.39 min;the M-ZnS transitioned from light yellow to transparent,face shape PV decreased from 0.668μm to 0.229μm,with a 65%improvement,and surface roughness Sa went from 7.911 nm to 2.472 nm,with a 68%enhancement.Thus,robotic polishing proves vital for efficient,high-quality finishing of M-ZnS optical components.

关 键 词：机器人抛光 M-ZnS 去除函数 工艺优化 面形精度 表面粗糙度 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置] TN213[自动化与计算机技术—控制科学与工程] TG580.692[电子电信—物理电子学]