Detector-integrated vertical-cavity surfaceemitting laser with a movable high-contrast grating mirror  

作　　者：MINGLU WANG HONGLING PENG CHENXI HAO XUYAN ZHOU WANHUA ZHENG ANJIN LIU 

机构地区：[1]Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [3]School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [4]Key Laboratory of Solid-State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

出　　处：《Photonics Research》2024年第7期1437-1448,共12页光子学研究（英文版）

基　　金：National Natural Science Foundation of China(62075209, 62275243, 61675193);Beijing Municipal Natural Science Foundation (Z200006)。

摘　　要：In this paper, we present a detector-integrated vertical-cavity surface-emitting laser(VCSEL) with a movable high-contrast grating(HCG) mirror in an n-i-p-i-n manner. The detector-integrated VCSEL with a movable HCG can achieve three functions, including wavelength tuning, power monitoring, and resonant-cavity-enhanced(RCE)photon detection. Currently, the device can achieve a wavelength tuning range of 27 nm at room temperature when the suspended HCG is driven by the reverse-bias voltage. The n-i-p structure located at the upper part of the device can serve as an intra-cavity photodiode to monitor the output power due to the defect absorption. The RCE photon detection function of the detector-integrated VCSEL with a movable HCG is measured, and it has a peak responsivity at about 926 nm. This detector-integrated VCSEL with a movable HCG will be useful for sensing and imaging.

关 键 词：tuning LASER CAVITY 

分 类 号：TN248[电子电信—物理电子学]