基于电化学金属化的偏振无关超表面光开关  

Polarization-Independent Metasurface Optical Switch Based on Electrochemical Metallization

作　　者：吴凯 陈治良 李忠洋[1] 邴丕彬[1] 徐娟 张红涛[1] 谭联[1] 姚建铨[2] Wu Kai;Chen Zhiliang;Li Zhongyang;Bing Pibin;Xu Juan;Zhang Hongtao;Tan Lian;Yao Jianquan(College of Electrical Engineering,North China University of Water Resources and Electric Power,Zhengzhou 450045,Henan,China;The Institute of Laser and OptoElectronics,School of Precision Instrument and OptoElectronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]华北水利水电大学电气工程学院,河南郑州450045 [2]天津大学精密仪器与光电工程学院,激光与光电子研究所,天津300072

出　　处：《激光与光电子学进展》2024年第13期392-398,共7页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61735010,31671580,61601183);河南省自然科学基金(232300421391,222300420233,162300410190);河南省重点研究发展计划项目(202102210390,222102210242);河南省青年骨干教师项目(2020GGJS099)。

摘　　要：提出了一种工作在1.55μm波长处的基于电化学金属化的偏振无关超表面光开关。该器件子单元包括硅衬底,二氧化硅介质层和嵌入二氧化硅中的银十字结构。子单元之间导电细丝的形成和断裂可以改变银十字结构的共振波长,从而触发光开关的开启或关闭。数值结果表明,所提出的超表面光开关在1.55μm波长处的消光比可以达到14 dB以上,并且对于横电(TE)模和横磁(TM)模的光不敏感。所提出的器件有望解决高功耗和大规模光开关的问题,可用于光开关、光调制、光存储和计算以及大规模光子集成器件中。A polarizationindependent metasurface optical switch based on electrochemical metallization working at 1.55μm is proposed.The unit cell of the device comprises a silicon substrate,silica dielectric layer,and silver cross structure embedded in silica.The formation and rupture of conductive filaments between subunits can alter the resonant wavelength of the cross structure,which triggers the state of the optical switch on or off.Numerical results demonstrate that the extinction ratio of the metasurface optical switch can exceed 14 dB at 1.55μm,and it is insensitive to the transverse electric(TE)mode and transverse magnetic(TM)mode of light.The proposed device is expected to address the problems of highpower consumption,enabling the adoption of largescale optical switches in optical switches,optical modulation,optical storage and computing,and largescale photonic integrated devices.

关 键 词：电化学金属化 偏振无关 导电细丝 光开关 超表面 

分 类 号：O441.4[理学—电磁学]