热式风传感器的仿真优化设计  

Simulation and Optimization Design of Thermal Wind Sensor

作　　者：宋高莹 高经武 杨哲懿 邱永锋 SONG Gaoying;GAO Jingwu;YANG Zheyi;QIU Yongfeng(School of Aerospace Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学航空宇航学院,山西太原030051

出　　处：《中北大学学报（自然科学版）》2024年第5期573-582,共10页Journal of North University of China(Natural Science Edition)

摘　　要：本文基于热温差原理,利用有限元分析软件ANSYS对热式风传感器在恒功率和温度平衡两种控制模式下的工况进行了模拟,分析了芯片结构的不同特征尺寸参数对传感器输出性能的影响规律。研究结果表明:传感器的输出分别随着芯片边长和厚度、加热元件长度的增加而增大,而当加热元件和测温元件之间距离增加时,输出减小。优化结构尺寸后的传感器在恒功率模式下,风向误差小于±2°,风速在0~15 m/s时,误差小于10%;温度平衡模式下,风向误差为±3°,风速有效测量范围可达0~20 m/s,误差小于5%,测量精度有所提高。Based on the principle of thermal temperature difference,this article used the finite element analysis software ANSYS to simulate the working conditions of the thermal wind sensor under two control modes of constant power and temperature-balanced.The influence of different dimensional parameters of the chip structure on the sensor’s output performance was analyzed.The research results show that the output of the sensor increases with the increase of chip side length and thickness,as well as the length of the heating element.However,the output decreases as the distance between the heating element and the sensing element increases.After optimizing the structural dimensions,the sensor’s wind direction error is less than±2°in constant power mode,and when the wind speed is in the range of 0-15 m/s,the error is less than 10%.In temperature-balanced mode,the wind direction error is±3°,and the effective measurement range of wind speed can reach 0-20m/s,with an error of less than 5%,and the measurement accuracy is improved.

关 键 词：风速 风向 热温差 恒功率模式 温度平衡模式 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]