基于飞秒激光刻写的微腔型波导马赫-曾德干涉器及其折射率传感性能研究  

Research on Microcavity Waveguide Mach-Zender Interferometer and Its Refractive Index Sensing Performance Based on Femtosecond Laser Writing

作　　者：徐堃 玄成聪 张燕青 姚一村[1] 解艳茹 XU Kun;XUAN Chengcong;ZHANG Yanqing;YAO Yicun;XIE Yanru(School of Physical Science and Information Engineering,Liaocheng University,Liaocheng 252059,China)

机构地区：[1]聊城大学物理科学与信息工程学院,山东聊城252059

出　　处：《聊城大学学报（自然科学版）》2024年第5期76-83,共8页Journal of Liaocheng University:Natural Science Edition

基　　金：山东省自然科学基金项目(ZR2020F086);聊城大学博士科研基金项目(318052168)资助。

摘　　要：平面光波导传感器相较于传统的光纤传感器结构,具有更好的机械性能,并且对于振动等因素具有更低的交叉响应,因此在光传感领域具有独特优势。在本研究中,我们利用飞秒激光刻写及激光辅助化学刻蚀技术,在石英玻璃中制备了微腔型波导传感器结构,该结构由对称的分支型波导马赫-曾德干涉器及在其中一路上所制备的光学微腔构成。当待测液体浸入微腔时,传感器呈现明显的干涉峰漂移,其折射率灵敏度在1.35折射率附近达到了约16311.8 nm/RIU,因此在高灵敏度的波导液体传感及生化传感领域展现出了显著的应用潜力。Planar optical waveguide sensors have a unique advantage in the field of optical sensing because of their better mechanical properties and lower cross response to vibration and other factors than traditional optical fiber sensor structures.In this study,we use femtosecond laser writing and laser-assisted chemical etching techniques to fabricate microcavity waveguide sensor structures in quartz glass.The structures are composed of symmetric branch waveguide Mach-Zehnder interferometer and optical microcavities prepared along the way.When the liquid to be measured is immersed in the microcavity,the sensor shows obvious interference peak shift,and its refractive index sensitivity reaches about 16311.8 nm/RIU near 1.35 refractive index.Therefore,it shows significant application potential in the field of high-sensitivity waveguide liquid sensing and biochemical sensing.

关 键 词：平面波导 飞秒激光微加工 微腔传感器 马赫-曾德干涉仪 

分 类 号：TN814[电子电信—信息与通信工程]