微弱光探测器光谱响应测量装置  

Low Light Level Spectral Responsivity Measurement System

作　　者：吕亮[1] 罗宇鹏 姜晓梅[1] 林晓峰 庞博文 LÜLiang;LUO Yupeng;JIANG Xiaomei;LIN Xiaofeng;PANG Bowen(Optic Division,National Institute of Metrology,Beijing 100029,China;School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]中国计量科学研究院光学所,北京100029 [2]北京理工大学光电学院,北京100081

出　　处：《计量学报》2024年第8期1089-1095,共7页Acta Metrologica Sinica

基　　金：国家重点研发计划(2016YFF0200303)。

摘　　要：为满足光子计数类型光电探测器光谱响应度的计量需求,建立了微弱光探测器光谱响应测量装置,其特点是可在pW级单色光功率水平下实现光谱比较测量。设计了可调式亮度源,与色散相减双光栅单色仪密闭耦合后实现了6个量级的功率可调单色光输出,可适用于不同光子探测器的线性工作区间,波长范围覆盖330~1 100 nm。设计的密闭准直光路使系统可在正常照明环境下工作,降低了实验环境要求。以集成fA级电流放大器的标准探测器为参考,实现被测光子探测器计数率在1×10^(6)个/s量级的光谱响应度测量。基于LabView编写了专用的控制及数据采集软件,实现了自动化测量。对系统的各项计量特性进行了实验,在330~1 100 nm波段内完成了光子探测器相对光谱响应度测量,相对扩展不确定度为(2.5~3.8)%,k=2。To meet the spectral responsivity calibration requirements of photon counting detectors,a low light level spectral responsivity measurement system is established.The feature of this system is that it can achieve spectral comparison measurement at pW monochromatic light power level.An adjustable luminance source is designed,and it is tightly coupled with the dispersion subtractive double grating monochromator to achieve power variable monochromatic light output with six orders,which can be applied to the linear working range of different photon detectors,covering the wavelength range 330~1100nm.The light-tight designation of the light path enables the system to work under normal lighting conditions,reducing the experimental environment requirements.Based on a standard detector integrated with fA grade current amplifier,the spectral responsivity measurement of the photon detectors at 1×10^(6)photons/s count rate level is achieved.The controlling and data acquisition software are developed using LabView platform,which realizes the whole process of measurement automation.The characteristics experiment of the system has been carried out,and the relative spectral responsivity of photon detector are calibrated in the wavelength range from 330~1100nm with relative expanded uncertainty is(2.5~3.8)%,k=2.

关 键 词：光学计量 光谱响应度 光谱比较 微弱光测量 光子计数 不确定度 

分 类 号：TB96[机械工程—光学工程]