基于共价有机框架材料的QCM二氧化碳气体检测系统  

QCM Carbon Dioxide Gas Detection System Based on Covalent Organic Framework Materials

作　　者：赵利强[1] 向星岩 徐潇依 王刚 陈伟 张彤[2,3] ZHAO Liqiang;XIANG Xingyan;XU Xiaoyi;WANG Gang;CHEN Wei;ZHANG Tong(College of Information Science and Technology,Beijing University of Chemical Technology;College of Electronic Science and Engineering,Jilin University;State Key Laboratory of Integrated Optoelectronics,Jilin University;Hanwei Electronics Group Corporation)

机构地区：[1]北京化工大学信息科学与技术学院 [2]吉林大学电子科学与工程学院 [3]吉林大学集成光电子学国家重点实验室 [4]汉威科技集团股份有限公司

出　　处：《仪表技术与传感器》2024年第8期53-59,共7页Instrument Technique and Sensor

基　　金：国家重点研发计划项目(2021YFB3200403)。

摘　　要：为了实现人居环境下高精度二氧化碳气体检测,设计了一种基于共价有机框架材料COF-5的石英晶体微天平(QCM)二氧化碳气体传感器及检测系统。分析了QCM质量灵敏度分布原理并进行了有限元仿真分析,利用超声法合成敏感材料,采用滴涂法制备基于金电极的QCM二氧化碳气体传感器,并设计了一种基于FPGA的二氧化碳气体检测系统。实验测试结果表明:开发的二氧化碳气体传感器及检测系统在二氧化碳气体浓度为2000~5000 ppm下表现出良好的线性响应,拟合曲线相关系数为0.988,系统灵敏度为0.034 Hz/ppm,响应时间为32 s,恢复时间为20 s,表现出良好的动态响应性能,系统最大绝对误差小于±25 ppm,且系统具有较好的重复性及选择性。In order to achieve high-precision carbon dioxide(CO2)gas detection in indoor environments,a quartz crystal mi-crobalance(QCM)CO2 gas sensor and detection system based on the covalent organic framework material COF-5 were de-signed.The principle of QCM quality sensitivity distribution was analyzed,and a finite element simulation analysis was conduc-ted.Using the ultrasonic method to synthesize the sensitive material,a QCM CO2 gas sensor based on gold electrodes was prepared using the drop-coating method.Additionally,a CO2 gas detection system based on FPGA was designed.Experimental results indi-cate that the developed CO2 gas sensor and detection system exhibit excellent linear response in the concentration range of 2000~5000 ppm of CO2,with a correlation coefficient of 0.988 for the fitted curve.The system sensitivity is 0.034 Hz/ppm,response time is 32 seconds,recovery time is 20 seconds,demonstrating excellent dynamic response performance.The systems maximum absolute error is less than±25 ppm,and it possesses good repeatability and selectivity.

关 键 词：共价有机框架材料 石英晶体微天平 二氧化碳检测 气体传感器 FPGA 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]