基于变波长矩阵结构的平面叉指电容传感器设计  

Design of Planar Interdigital Capacitance Sensor Based on Variable Wavelength Matrix Structure

作　　者：马文瑞 卜雄洙[1] 韩冰 MA Wenrui;BU Xiongzhu;HAN Bing(School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《仪表技术》2024年第5期22-26,共5页Instrumentation Technology

摘　　要：针对平面叉指电容传感器在陶瓷材料介电常数测量时存在的穿透深度有限、测量准确度不高的问题,提出了一种改进方案。新型传感器采用电极矩阵结构,融入波长渐变设计。通过COMSOL Multiphysics有限元仿真软件,分析了传感器矩阵的静电场分布,比较了不同电极组合下的信号变化趋势,优化了电极矩阵结构。实验结果表明,改进后的叉指电容传感器对陶瓷材料的穿透能力超过了4 mm,相较于传统结构传感器,其探测能力提高了两倍以上。Aiming at the problems of limited penetration depth and low measurement accuracy in the measurement of dielectric constant of ceramic materials using planar interdigital capacitive sensors,an improvement scheme is proposed.The new sensor adopts an electrode matrix structure and incorporates a wavelength gradient design.By using COMSOL Multiphysics finite element simulation software,the static electric field distribution of the sensor matrix is analyzed,and the signal variation trends under different electrode combinations are compared.The electrode matrix structure is optimized.The experimental results show that the improved cross finger capacitive sensor has a penetration ability of more than 4 mm in ceramic materials,which is more than twice the detection capability of traditional structural sensors.

关 键 词：叉指电容 介电常数 穿透深度 有限元仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]