基于离焦模糊参数估计的晶圆离焦图像复原  

Wafer Defocusing Image Restoration Based on Defocusing Fuzzy Parameter Estimation

作　　者：何睿清 张慧 郝飞[2] HE Ruiqing;ZHANG Hui;HAO Fei(School of Information and Communication Engineering,Nanjing Institute of Technology,Nanjing 211167,China;School of Mechanical Engineering,Nanjing Institute of Technology,Nanjing 211167,China)

机构地区：[1]南京工程学院信息与通信工程学院,南京211167 [2]南京工程学院机械工程学院,南京211167

出　　处：《组合机床与自动化加工技术》2024年第9期46-49,56,共5页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：江苏省研究生科研与实践创新计划项目(SJCX22_1066)。

摘　　要：通过高分辨率晶圆离焦图像获得点扩散函数的离焦模糊参数存在计算量大,复原效率低等问题,为此提出了一种基于光斑图像计算离焦模糊参数的晶圆离焦图像复原方法。首先,对光斑图像进行灰度投影,获取线扩散函数曲线;其次,对线扩散函数曲线进行拟合校正,以获得离焦模糊参数,从而确定点扩散函数;最后,采用二次维纳滤波算法对晶圆离焦图像进行复原。实验结果表明,所提出的估计离焦模糊参数的二次维纳滤波方法对晶圆离焦图像进行复原,能够显著提高晶圆离焦图像的峰值信噪比(PSNR),至少提升了0.74 dB,减轻晶圆离焦图像的模糊程度,突显出图像的细节信息,并且计算量小,从而提高复原效率。The defocusing fuzzy parameters of the point diffusion function obtained from high resolution wafer defocusing images are difficult to calculate and have low recovery efficiency.Therefore,a method of defocusing image restoration based on spot image is proposed.Firstly,the gray-scale projection of the spot image is carried out to obtain the line diffusion function curve.Then the line diffusion function curve is fitted and corrected to obtain the defocusing fuzzy parameters,so as to determine the point diffusion function.Finally,the second Wiener filter algorithm is used to restore the wafer defocusing image.The experimental results show that The second Wiener filter method proposed in this paper to estimate defocusing fuzzy parameters for wafer defocusing images can significantly improve the peak signal-to-noise ratio(PSNR)of wafer defocusing images by at least 0.74 dB,reduce the blurring degree of wafer defocusing images,highlight the details of images,and reduce the calculation amount,thus improving the recovery efficiency.

关 键 词：晶圆离焦图像 离焦模糊参数 点扩散函数 二次维纳滤波 

分 类 号：TH166[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]