近红外单层大视场角超透镜研究  

Research on the Near-Infrared Single-Layer Metalens with Large Field-of-View

作　　者：陈若卉 鲁依林 赵兴岩 邱阳 郑少南 钟其泽 董渊 胡挺 CHEN Ruohui;LU Yilin;ZHAO Xingyan;QIU Yang;ZHENG Shaonan;ZHONG Qize;DONG Yuan;HU Ting(School of Microelectronics,Shanghai University;Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology,Shanghai University,Shanghai 201800,CHN)

机构地区：[1]上海大学微电子学院 [2]上海大学上海市智能感知芯片技术协同创新中心,上海201800

出　　处：《半导体光电》2024年第4期530-535,共6页Semiconductor Optoelectronics

基　　金：上海市智能感知芯片技术协同创新中心、上海市汽车智能网联交互芯片与系统重点实验室揭榜挂帅项目;红外探测国家重点实验室开放课题项目(IRDT-23-08);国家自然科学基金项目(62204149,62205193,U23A20356)。

摘　　要：大视场角透镜是成像系统的重要组成部分。为实现大视场成像效果,传统光学中需要由多个镜片组成的透镜组来纠正不同入射光角度带来的像差,从而在整个视场范围内获得无畸变的清晰图像。文章设计并制造了一种近红外超透镜,由分布在衬底两侧的单层超表面和金属光阑组成。该器件能够有效抑制像差,在940 nm波长下实现120°的广角成像。实验结果证明所制造的器件在设计的视场角范围内具有良好的聚焦性能,平均实验聚焦效率为45%。Large field-of-view(FOV)lens is an essential component in imaging systems.To realize the large FOV,conventional optics requires the combination of multiple lenses into a lens group to correct the aberration caused by different angles of incident light.In this paper,a near-infrared metalens is designed and fabricated,which consists of a single-layer metasurface and a metal aperture distributed on both sides of the substrate.The device can suppress aberration effectively and realize a 120°large FOV imaging at the wavelength of 940 nm.Experiments have demonstrated that the fabricated device exhibits good focusing performance within the designed FOV range,with an average experimental focusing efficiency of 45%.

关 键 词：超表面 超透镜 大视场角 近红外 光学设计 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术] TN219[自动化与计算机技术—计算机科学与技术]