精密位移传递的直径三点轴承内外径高精度检测  

High-precision measurement of inner and outer diameterof three-point bearings for precise displacement transfer

作　　者：陈国学 于硕 王玮[1] 白雪龙 李文昊[1] 周文渊 巴音贺希格[1] CHEN Guo-xue;YU Shuo;WANG Wei;BAI Xue-long;LI Wen-hao;ZHOU Wen-yuan;Bayinhexige(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《东北师大学报（自然科学版）》2024年第3期95-103,共9页Journal of Northeast Normal University(Natural Science Edition)

基　　金：中国科学院战略性先导科技专项项目(XDC04030100);国家自然科学基金联合项目(U21A20509);国家自然科学基金面上项目(52275554);吉林省科技发展计划项目(20230201057GX).

摘　　要：基于V形块角分线特性,结合光栅精密位移测量技术,通过精密位移传递方式实现了轴承内外径的检测.此方法通过测量直径三点空间距离进行内外径检测,计算时不存在数据拟合误差,且对不同曲率轴承可实现快速装夹,测量效率及精度高.先通过建立坐标系推导了基于该测量方法的位移传递数学模型,为精度分析提供理论基础;然后分析了轴承夹具装调误差、杠杆传感器装调误差、轴承最大直径寻迹误差及位移台轴系正交性误差对测量精度的影响;并根据提出的V形块角分线多点对准法实现了轴承夹具的高精度装调;最后搭建实验平台,进行了高精度环规内径测量实验.实际检测结果表明,基于该测量方法搭建的系统对直径分别为75.0004和24.9994 mm环规测量的准确度分别为0.68和0.69μm,满足精密轴承内外径检测的需求.In this paper,based on the V-block angular line characteristic,combined with the grating precision displacement measurement technology,the inner and outer diameter of the bearing is detected through the precision displacement transfer method.This method detects the inner and outer diameters by measuring the spatial distance of three points of the diameter,there is no data fitting error in the calculation,and it can realize fast clamping for bearings with different curvatures,with high measurement efficiency and precision.Firstly,the mathematical model of displacement transfer based on this measurement method is deduced by establishing a coordinate system,which provides a theoretical basis for the accuracy analysis;then,the effects of the mounting error of bearing fixture,mounting error of lever sensor,tracing error of the maximum diameter of the bearing,and orthogonality error of the axis system of the displacement stage on the measurement accuracy are analyzed;then,the high-precision mounting of the bearing fixture is realized based on the proposed V-block angle-split line multi-point alignment method;finally,the experimental platform is set up to carry out the high-precision ring diameter inspection.Finally,the experimental platform was constructed and the high-precision ring gauge inside diameter measurement experiment was carried out.According to the actual inspection results of the high-precision ring gauges,it is shown that the accuracy of the system based on the measurement method for bearings with diameters of 75.0004 and 24.9994 mm is 0.68 and 0.69μm respectively,which can satisfy the requirements for the inspection of the inner and outer diameters of precision bearings.

关 键 词：轴承内外径 V形块 精密位移台 精密位移传递 

分 类 号：TH711[机械工程—测试计量技术及仪器]