扫描电子显微镜用X射线能谱仪在定量分析中的应用  

Application of scanning electron microscopy and X-ray energy spectrometer in quantitative analysis

作　　者：曹艳芬 曹方方 孔强强 宋鹏 辛玲 李海娥 CAO Yanfen;CAO Fangfang;KONG Qiangqiang;SONG Peng;XIN Ling;LI Haie(Jining Institute of Quality&Metrology Inspection,Jining 272000,China;Shandong Provincial Eco-environment Monitoring Center,Ji’nan 250101,China)

机构地区：[1]济宁市质量计量检验检测研究院,济宁272000 [2]山东省生态环境监测中心,济南250101

出　　处：《理化检验（物理分册）》2024年第9期15-18,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：扫描电子显微镜用X射线能谱仪分析是元素定量分析的重要手段。对X射线能谱仪定量分析的基本工作原理进行简述,并对X射线能谱仪的定量分析方式、提高定量分析结果准确性的方法,以及定量分析中常见的问题进行了探讨,为进一步提高能谱仪定量分析的准确性提供了一定的参考。Scanning electron microscopy and X-ray energy spectrometer analysis were important methods for quantitative analysis of elements.The basic working principle of quantitative analysis of X-ray energy spectrometer was briefly described,and discussed the quantitative analysis methods of X-ray energy spectrometer,methods to improve the accuracy of quantitative analysis results,and common problems in quantitative analysis.It provided a certain reference for further improving the accuracy of quantitative analysis of energy spectrometer.

关 键 词：X射线能谱仪 元素定量分析 加速电压 计数率 谱峰 

分 类 号：TH89[机械工程—仪器科学与技术] TG115.2[机械工程—精密仪器及机械]