半导体行业废水处理与再生技术探讨  

Exploring Wastewater Treatment and Regeneration Technologies for the Semiconductor Industry

作　　者：郭莉 李旭鹏 Guo Li;Li Xupeng(Zhuzhou CRRC Times Semiconductor Co.,Ltd.,Zhuzhou 412000,China)

机构地区：[1]株洲中车时代半导体有限公司,湖南株洲412000

出　　处：《广东化工》2024年第18期122-126,共5页Guangdong Chemical Industry

摘　　要：随着中国半导体行业的高速发展,该行业的生产过程中纯水使用量和废水排放量不断增加。本文对半导体行业废水的特性和主要废水类型进行了系统梳理,对各种废水处理方法及其优缺点进行了总结,并探讨了废水再生工艺和其中的膜污堵机制及解决措施。最后,本文展望了半导体行业废水处理和再生方面的未来发展。With the rapid development of China's semiconductor industry,the usage and discharge of pure water in the production process have been increasing continuously.This article systematically summarizes the characteristics and main types of wastewater in the semiconductor industry,and summarizes various wastewater treatment methods and their advantages and disadvantages.It also explores the wastewater regeneration process and the membrane fouling mechanism and solutions.Finally,this article anticipates the future development of wastewater treatment and regeneration in the semiconductor industry.

关 键 词：半导体行业废水 处理工艺 废水再生 膜污堵 

分 类 号：TQ[化学工程]