Study on Static Deflection Model of MEMS Capacitive Microwave Power Sensors  

作　　者：Ye JIN Debo WANG 

机构地区：[1]College of Electronic and Optical Engineering&College of Flexible Electronics(Future Technology),Nanjing University of Posts and Telecommunications,Nanjing 210023,China [2]College of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China

出　　处：《Chinese Journal of Electronics》2024年第5期1188-1195,共8页电子学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant No.61904089);the Province Natural Science Foundation of Jiangsu(Grant No.BK20190731);the China Postdoctoral Science Foundation(Grant No.2017M621692);Student’s Platform for Innovation and Entrepreneurship Training Program(Grant No.202210293012Z).

摘　　要：In this paper,a static deflection model of MEMS cantilever beam is proposed,which can better study the force deformation of micro-electro-mechanical system(MEMS)cantilever beam and the output characteristics of capacitive microwave power sensor.The deflection curve is used to describe the deformation of the cantilever beam and then the overload power and sensitivity of this power sensor are derived.It is found that the overload power decreases with the beam length,and increases with the initial height of beam.The sensitivity increases with the beam length,and has a linear growth relationship with the measuring electrode width.A MEMS dual-channel microwave power sensor is designed,fabricated and measured.At a microwave signal frequency of 10 GHz,the sensitivity of the sensor is measured to be 0.11 V/W for the thermoelectric detection channel and 65.17 fF/W for the capacitive detection channel.The sensitivity calculated by the lumped model is 92.93 fF/W,that by the pivot model is 50.88 fF/W,and that by the deflection model proposed in this work is 75.21 fF/W.Therefore,the theoretical result of the static deflection model is more consistent with the measured result and has better accuracy than the traditional lumped model and pivot model.

关 键 词：Micro-electro-mechanical system(MEMS)cantilever beam Static deflection model Power sensor Overload power Sensitivity 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH-39[自动化与计算机技术—控制科学与工程]