高纯气体最低检测限的研究  

Research on the Minimum Detection Limit for Measuring High-purity Gases

作　　者：唐峰 党晓婧 郑择 郁光 方华 TANG Feng;DANG Xiaojing;ZHENG Ze;YU Guang;FANG Hua(Shenzhen Power Supply Co.,Ltd.,Shenzhen 518000,China;Shanghai Huaai Chromatography Analysis Co.,Ltd.,Shanghai 200940,China)

机构地区：[1]深圳供电局有限公司,广东深圳518000 [2]上海华爱色谱分析技术有限公司,上海200940

出　　处：《低温与特气》2024年第4期11-15,共5页Low Temperature and Specialty Gases

摘　　要：采用多组分配气系统稀释高纯气体中的永久气体组分,得到不同浓度的标准气体,采用脉冲氦离子化气相色谱仪(GC-PDD)进行检测,实验结果表明,PDD具有高灵敏度和良好的线性度,可以实现超低浓度样品的检测,进一步验证了PDD的实际最低检测限可达到ng/g(10^(-9))水平。The multi-group gas distribution system was used to dilute the permanent gas components in the high-purity gas,and the standard gases of different concentrations obtained were detected by pulsed helium ionized gas chromatograph(GC-PDD).The experimental results show that PDD has high sensitivity and good linearity,which can realize the detection of ultra-low-concentration samples,and further verifies that the actual minimum detection limit of PDHID can reach the level of ng/g(10^(-9)).

关 键 词：多组分配气系统 脉冲放电氦离子化检测器 检测限 灵敏度 

分 类 号：O657.7[理学—分析化学]