气相色谱法测定高纯六氟化钼中的微量杂质  

Determination of Trace Impurities in High Purity Molybdenum Hexafluoride by Gas Chromatography

作　　者：倪珊珊 申永明 吕舜 解晓虎 刘志阳 李冰 NI Shanshan;SHEN Yongming;L Shun;XIE Xiaohu;LIU Zhiyang;LI Bing(PERIC Special Gases Co.,Ltd.,Handan 057550,China)

机构地区：[1]中船(邯郸)派瑞特种气体股份有限公司,河北邯郸057550

出　　处：《低温与特气》2024年第4期49-51,共3页Low Temperature and Specialty Gases

摘　　要：提出了一种六氟化钼中微量气体杂质的分析方法,采用配备反吹气路的氦离子化检测器的气相色谱仪实现了高纯六氟化钼中微量H_(2),N_(2),O_(2),CH_(4),CO,CF_(4),CO_(2),N_(2)O和SF_(6)的分离检测。A method is pulsed to analyze trace gaseous impurities in molybdenum hexafluoride.By using discharged helium ionization detector gas chromatography equipped with blowback gas path,we achieve the separation and analysis of trace H_(2),N_(2),O_(2),CH_(4),CO,CF_(4),CO_(2),N_(2)O and SF_(6)in molybdenum hexafluoride.

关 键 词：六氟化钼 气相色谱 氦离子化检测器 反吹 

分 类 号：O657.7[理学—分析化学]