Ultrasensitive stretchable patches for joint motion monitoring  

用于关节运动监测的超灵敏可伸缩贴片

作　　者：LI Tengteng LI Ziwei HAO Yafeng WU Huijia ZHU Pu MA Fupeng LI Fengchao YU Jiangang LIU Meihong LEI Cheng LIANG Ting 李腾腾;李子唯;郝亚峰;武慧嘉;朱璞;马富鹏;李丰超;余建刚;刘美宏;雷程;梁庭(中北大学半导体与物理学院,山西太原030051;中北大学动态测试技术国家重点实验室,山西太原030051)

机构地区：[1]School of Semiconductor and Physics,North University of China,Taiyuan 030051,China [2]State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China

出　　处：《Journal of Measurement Science and Instrumentation》2024年第3期285-291,共7页测试科学与仪器（英文版）

基　　金：supported by National Natural Science Foundation of China(Nos.62301509,62304209);Key Research and Development Program of Shanxi Province(No.202302030201001);Fundamental Research Program of Shanxi Province(Nos.202203021222079,0210302123203,202103021223185).

摘　　要：Wearable devices have great application potential in the next generation of smart portable electronics,especially in the fields of medical monitoring,soft robotics,artificial intelligence,and human-machine interfaces.Piezoelectric flexible strain sensors are key components of wearable devices.However,existing piezoelectric flexible strain sensors have certain limitations in weak signal monitoring due to their large modulus and low sensitivity.To solve this problem,the concept of Kirigami(paper-cutting)was introduced in this study to design the sensor structure.By comparing the Kirigami structures of different basic structures,the serpentine structure was determined as the basic configuration of the sensor.The serpentine structure not only provides excellent tensile properties,but also significantly improves the sensitivity of the sensor,which performs well in monitoring weak signals.On this basis,the adhesion properties of the flexible sensor were analyzed and tested,and the optimal ratio of the substrate was selected for preparation.In addition,a low-cost and rapid prototyping process for stretchable patches was established in this study.Using this technology,we prepared the sensor device and tested its performance.Finally,we successfully developed a flexible sensor with a sensitivity of 0.128 mV/μɛand verified its feasibility for wrist joint motion monitoring applications.This result opens up new avenues for the recovery care of tenosynovitis patients after surgery.可穿戴设备在新一代智能便携电子领域,特别是在医疗监测、软体机器人、人工智能以及人机交互等领域展现出巨大的应用潜力。压电柔性应变传感器是可穿戴设备的关键部件,但现有压电柔性应变传感器由于模量大、灵敏度低,在微弱信号监测方面具有一定的局限性。为解决这一问题,引入了Kirigam(i剪纸)概念来设计传感器结构。通过对不同基本结构进行比较,最终确定传感器结构为蛇形结构。蛇形结构不仅提供了出色的拉伸性能,还显著提升了传感器的灵敏度,在监测微弱信号方面表现出色。在此基础上,进一步分析和测试了柔性传感器的粘附性能,并选择了最优的基底材料比例进行制备。此外,还建立了一种低成本、快速的可拉伸贴片制备工艺,并利用这一技术,制备了传感器设备并对其性能进行测试。最终,成功开发出一种灵敏度为0.128 mV/μɛ的柔性传感器,并验证了其在手腕关节动作监测应用中的可行性。这一成果为腱鞘炎患者手术后的恢复护理开辟了新的道路。

关 键 词：flexible sensor piezoelectric film motion monitoring wearable sensor 

分 类 号：TH789[机械工程—仪器科学与技术]