基于静电力的非接触式微悬臂梁刚度标定方法  

Non-contact microcantilever stiffness calibration method based on electrostatic force

作　　者：张世玉 赵聆喆 于枚可 赵美蓉[1] 郑叶龙[1] Zhang Shiyu;Zhao Lingzhe;Yu Meike;Zhao Meirong;Zheng Yelong(School of Precision Instrument and Opto-Electronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《仪器仪表学报》2024年第6期256-265,共10页Chinese Journal of Scientific Instrument

基　　金：国家重点研发计划(2021YFC2202700)项目资助。

摘　　要：微悬臂梁刚度的标定在工业和学术研究中有重要的意义。传统微悬臂梁标定方法存在粘附摩擦、接触磨损等缺点。为了有效解决传统刚度标定中接触摩擦的难题,本文提出一种基于静电力的非接触式微悬臂梁刚度标定方法。该方法将静电力作为标准载荷施加于微悬臂梁末端,基于胡克定律计算微悬臂梁刚度。对平行极板结构进行了数值模拟,结果显示微悬臂梁与参考极板的相对位置存在较小的偏差时,静电力偏差小于5%。静电力标定实验结果显示微悬臂梁刚度为0.344 N/m,相对测量不确定度为1.86%。该方法适用于微悬臂梁的刚度标定,对微纳力值研究领域具有重大意义。The calibration of the stiffness of microcantilever is of great significance in industrial and academic research.The traditional calibration method for microcantilever has drawbacks such as adhesive friction and contact wear.In order to effectively solve the problem of contact friction in traditional stiffness calibration,this paper proposes a non-contact microcantilever stiffness calibration method based on electrostatic force.This method applied static electricity as a standard load to the end of a microcantilever and calculated the stiffness of the microcantilever based on Hooke′s law.Numerical simulations of a parallel plate structure showed that when there is a small deviation in the relative position between the microcantilever and the reference electrode,the electrostatic force deviation is less than 5%.The results of the electrostatic force calibration experiment showed that the stiffness of the microcantilever was 0.344 N/m,with a relative measurement uncertainty of 1.86%.This method is suitable for stiffness calibration of microcantilever and holds significant implications for the research field of micro-force measurements.

关 键 词：微悬臂梁 刚度标定 静电力 不确定度 

分 类 号：TH823[机械工程—仪器科学与技术]