原子制造过程的可视化与原位检测  

Visualization and in-situ detection of atomic manufacturing processes

作　　者：李陈 叶茂 尹奎波 徐涛 孙立涛 LI Chen;YE Mao;YIN Kuibo;XU Tao;SUN Litao(School of Integrated Circuits,Southeast University,Nanjing 210096,Jiangsu,China)

机构地区：[1]东南大学集成电路学院,江苏南京210096

出　　处：《沈阳工业大学学报》2024年第5期702-709,共8页Journal of Shenyang University of Technology

基　　金：国家自然科学基金项目(12234005,T2321002)。

摘　　要：原子制造是指将能量直接作用于原子,对原子进行精准可控去除、增加等操作,从而调控材料结构和性质的技术。为实现原子制造的精准性和可控性,跨尺度的实时观察与检测势在必行。原位透射电子显微技术不仅能在原子尺度下实时研究纳米材料结构与性质之间的关系,而且可以构建原子级器件并实现其性能的原位检测。简要综述了原位透射电子显微技术在纳米/原子精度的加工、器件构建及原位检测方面取得的重要进展,提出了当前原位透射电子显微技术在原子制造过程的可视化与原位检测领域面临的挑战和未来的发展方向。Atomic manufacturing refers to the technology that directly applies energy on atoms to precisely and controllably remove or add atoms,thereby manipulating the structures and properties of materials.To achieve the precision and controllability of atomic manufacturing,multi-scale real-time observation and detection are imperative.In-situ transmission electron microscopy technique not only allows real-time study of the relationship between the structures and properties of nanomaterials at the atomic scale,but also enables the construction of atomic-level devices and in-situ detection of their performances.This article focuses on the significant progress made by in-situ transmission electron microscopy technique in the processing,device construction,and in-situ detection at the nanometer/atomic precision level.The article outlines the challenges and future development directions for the visualization and in-situ detection of atomic manufacturing processes using current in-situ transmission electron microscopy technique.

关 键 词：原子制造 可视化 原子尺度加工 原位检测 原位透射电子显微镜 纳米材料 实时观察 

分 类 号：TN16[电子电信—物理电子学]