硅基锗光电探测器的发展现状与未来趋势  

Current Status and Future Trends of Silicon-based Germanium Photodetectors

作　　者：李玲 闫亭伟 张宇峰 LI Ling;YAN Tingwei;ZHANG Yufeng(School of Astronautics,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]哈尔滨工业大学航天学院,哈尔滨150001

出　　处：《前瞻科技》2024年第3期61-74,共14页Science and Technology Foresight

基　　金：黑龙江省自然科学基金(YQ2021F012)。

摘　　要：5G通信、人工智能、物联网等领域的快速发展对现有的通信系统提出了苛刻的要求。目前,具有低延时、低功耗、大容量等特点的光互连作为新通信方案受到广泛关注,其中基于硅基光电子技术的光互连是最佳的技术选择之一。作为核心器件的硅基锗光电探测器对于硅基光互连的发展至关重要。文章对硅基锗光电探测器技术发展进行阐述分析,系统总结高性能硅基锗光电探测器的新型结构、关键工艺和发展过程中的技术创新,展望其发展趋势和热点技术与研究方向,以期为中国光通信系统建设和发展提供支持。The rapid development of 5G communication,artificial intelligence,Internet of Things,and other fields has put forward demanding requirements for existing communication systems.At present,optical interconnection with low latency,low power consumption,and large capacity is receiving widespread attention as a new communication solution,among which optical interconnection based on silicon-based photoelectrons is one of the best technologies.As the core device,silicon-based germanium photodetector is crucial for the development of silicon-based optical interconnection.This article analyzed the technological development of silicon-based germanium photodetectors,systematically summarized the new structure,key processes,and technological innovations in the development of high-performance silicon-based germanium detectors,and predicted the development trend,hot technologies,and research directions,with a view to providing support for the construction and development of China’s optical communication systems.

关 键 词：光通信系统 光互连技术 硅基光子学 硅基光电探测器 硅基锗光电探测器 

分 类 号：TN36[电子电信—物理电子学]