基于氮化钛圆台结构的超材料层叠吸收器研究  

Metamaterial stacked absorber based on titanium nitride dome structure

作　　者：鲍辙亦 刘春梅[1,2] 吴元庆 张宇峰[1,2] BAO Zheyi;LIU Chunmei;WU Yuanqing;ZHANG Yufeng(School of Physical Science and Technology,Bohai University,Jinzhou121013,Liaoning Province,China;Key Laboratory of Microelectronics Process Control in Liaoning Province,Jinzhou121013,Liaoning Province,China)

机构地区：[1]渤海大学物理科学与技术学院,辽宁锦州121013 [2]辽宁省微电子工艺控制重点实验室,辽宁锦州121013

出　　处：《电子元件与材料》2024年第8期944-949,共6页Electronic Components And Materials

基　　金：国家自然科学基金(61575029)。

摘　　要：在光学促吸收方面,考虑到贵金属昂贵的成本问题,研究了基于氮化钛圆台结构的超材料叠层吸收器。通过对等离激元理论和MIM结构理论的研究,证明多层叠层结构可以有效改善结构的光学参数匹配问题,进而实现特定波长的促吸收。通过构建氮化钛超材料结构模型,分析其近红外吸收性能。并对初始结构进行优化,主要包括上表面二氧化硅厚度、下表面二氧化硅厚度、氮化钛圆台厚度和直径、入射光角度等参数,最终获得优化后的结构性能。在1500~2500 nm波长范围内的平均吸收率达到了96.04%,相比初始研究模型,吸收效率提升了约16%。In terms of optical absorption enhancement,considering the high cost of precious metals,a metamaterial stacked absorber based on titanium nitride circular cone structure was studied.Through the study of plasmon theory and MIM structure theory,it was proven that multi-layer stacked structures can effectively improve the optical parameter matching of the structure,thereby absorption enhancement at specific wavelengths could be achieved.By constructing a structural model of titanium nitride metamaterials,the near-infrared absorption performance of it was analyzed.And the initial structure was optimized,including the thickness of silica on the upper surface,the thickness of silica on the lower surface,the thickness and the diameter of titanium nitride frustum,and the incident light angle.Ultimately,the optimized structural performance was achieved.The average absorption rate is 96.04%in the wavelength range of 1500-2500 nm.Compared with the initial research model,the absorption efficiency of the optimized model was improved by about 16%.

关 键 词：氮化钛 超材料 等离激元 谐振腔 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]